Integrated array of SAW sensors for gas analysis

被引：0
|
作者：
Anisimkin, VI [1 ]
Fedosov, VI [1 ]
Krystal, RG [1 ]
Medved, AV [1 ]
Zemlyakov, VE [1 ]
Verona, E [1 ]
机构：
[1] Russian Acad Sci, Inst Radioengn & Elect, Moscow, Russia
来源：
1998 IEEE ULTRASONICS SYMPOSIUM - PROCEEDINGS, VOLS 1 AND 2 | 1998年
关键词：
D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
A new approach, based on the properties of SAW devices, is used to integrate an array of gas sensors into a single substrate, using a single chemical membrane. The different response of each individual device to the same set of gases is provided by different acoustic propagation conditions, only. Three four-sensor prototypes have been implemented on ST-cut quartz substrates, using different Pd films as membrane. Their response upon exposure to concentrations of H-2, N2O and CO in N-2 and to water humidity have been tested. A strong dependence of the response versus the acoustic propagation direction has been demonstrated for all the prototypes analyzed.
引用
收藏
页码：529 / 533
页数：5
相关论文
共 50 条
  • [21] Numerical Optimization of Structures SAW Gas Sensors
    Hejczyk, T.
    Urbanczyk, M.
    ACTA PHYSICA POLONICA A, 2013, 124 (03) : 432 - 435
  • [22] Advances in SAW-based gas sensors
    Caliendo, C
    Verardi, P
    Verona, E
    D'Amico, A
    Di Natale, C
    Saggio, G
    Serafini, M
    Paolesse, R
    Huq, SE
    SMART MATERIALS & STRUCTURES, 1997, 6 (06): : 689 - 699
  • [23] SAW Gas Sensors with Titania Nanotubes Layers
    Penza, M.
    Sadek, A. Z.
    Zheng, H. D.
    Aversa, P.
    McCulloch, D. G.
    Kalantar-zadeh, K.
    Wlodarski, W.
    SENSOR LETTERS, 2011, 9 (02) : 925 - 928
  • [24] SAW GAS SENSORS BASED ON ACOUSTOELECTRIC EFFECTS
    RICCO, AJ
    MARTIN, SJ
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1990, 199 : 65 - ANYL
  • [25] Coupled Mode Analysis of Integrated Optical Waveguide Array sensors
    Serunjogi, Solomon Micheal
    Viegas, Jaime
    2013 8TH INTERNATIONAL CONFERENCE ON DESIGN & TECHNOLOGY OF INTEGRATED SYSTEMS IN NANOSCALE ERA (DTIS), 2013, : 155 - 160
  • [26] Integrated circuit for SAW- and MEMS-sensors
    Fischer, WJ
    König, P
    Plötner, M
    Hermann, M
    Stab, H
    ELECTRONICS AND STRUCTURES FOR MEMS II, 2001, 4591 : 328 - 336
  • [27] Integrated sensor array for gas analysis in combustion atmospheres
    Getino, J
    Gutierrez, J
    Ares, L
    Robla, JI
    Horrillo, MC
    Sayago, I
    Agapito, JA
    SENSORS AND ACTUATORS B-CHEMICAL, 1996, 33 (1-3) : 128 - 133
  • [28] Integrated sensor array for analysis of multicomponent gas mixtures
    V. I. Anisimkin
    É. Verona
    V. E. Zemlyakov
    R. G. Kryshtal’
    A. V. Medved’
    Technical Physics Letters, 1998, 24 : 640 - 642
  • [29] Integrated sensor array for analysis of multicomponent gas mixtures
    Anisimkin, VI
    Verona, E
    Zemlyakov, VE
    Kryshtal, RG
    Medved, AV
    TECHNICAL PHYSICS LETTERS, 1998, 24 (08) : 640 - 642
  • [30] Pattern Recognition Applied to Analysis of Gas Sensors' Array Data
    Marczynski, P.
    Szpakowski, A.
    Tyszkiewicz, C.
    Pustelny, T.
    ACTA PHYSICA POLONICA A, 2012, 122 (05) : 847 - 849
12345