Fabrication of arrays of organic polymeric thin-film transistors using self-aligned microfluidic channels

被引：18

作者：

Chabinyc, ML ^{[1
]}

Wong, WS ^{[1
]}

Paul, KE ^{[1
]}

Street, RA ^{[1
]}

机构：

[1] Xerox Corp, Palo Alto Res Ctr, Palo Alto, CA 94304 USA

来源：

ADVANCED MATERIALS | 2003年 / 15卷 / 22期

关键词：

D O I：

10.1002/adma.200305533

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Arrays of organic thin-film transistors (TFTs; see Figure) were fabricated using self-aligned microfluidic channels. The self-aligned fluidic channels defined the active area of the TFTs and provided pixel-to-pixel isolation. TFTs made with a regioregular poly(thiophene) had field effect mobilities of 0.05 cm(2) V-1 s(-1) and on/off current ratios of 10(8).

引用

页码：1903 / +

页数：6

共 50 条

[21] Novel fabrication method for polycrystalline silicon thin-film transistors with a self-aligned lightly doped drain structure
Kobayashi, Kazuhiro
Murai, Hiroyuki
Sakamoto, Takao
Baert, Kris
Tokioka, Hidetada
Sugawara, Takashi
Masutani, Yuuichi
Namizaki, Hirofumi
Nunoshita, Masahiro
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1993, 32 (1 B): : 469 - 473
[22] Incorporating aligned carbon nanotube electrode arrays in organic thin-film transistors
Yi, Zhihui
Sayago, Jonathan
AIP ADVANCES, 2019, 9 (04)
[23] Film-Profile Engineered InGaZnO Thin-Film Transistors With Self-Aligned Bottom Gates
Shie, Bo-Shiuan
Lin, Horng-Chih
Huang, Tiao-Yuan
IEEE ELECTRON DEVICE LETTERS, 2015, 36 (08) : 787 - 789
[24] Investigation of Aluminum Metallized Source/Drain Thin Film Transistors Using a Self-Aligned Fabrication Process
Duy, Nguyen Van
Lee, Wonbaek
Jung, Sungwook
Nga, Nguyen Thanh
Son, Dang Ngoc
Kim, Kwangryul
Choi, Byoungdeog
Yi, Junsin
JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (09)
[25] Polysilicon thin-film transistors using self-aligned cobalt and nickel silicide source and drain contacts
Sarcona, GT
Stewart, M
Hatalis, MK
IEEE ELECTRON DEVICE LETTERS, 1999, 20 (07) : 332 - 334
[26] Improvement of reliability for polycrystalline thin-film transistors using self-aligned fluorinated silica glass spacers
Tu, CH
Chang, TC
Liu, PT
Zan, HW
Tai, YH
Feng, LW
Wu, YC
Chang, CY
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2005, 8 (08) : G209 - G211
[27] INVERTED THIN-FILM TRANSISTORS WITH A SIMPLE SELF-ALIGNED LIGHTLY DOPED DRAIN STRUCTURE
LIU, CT
YU, CHD
KORNBLIT, A
LEE, KH
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1992, 39 (12) : 2803 - 2809
[28] Erratum: Downscaling of self-aligned, all-printed polymer thin-film transistors
Yong-Young Noh
Ni Zhao
Maria Caironi
Henning Sirringhaus
Nature Nanotechnology, 2008, 3 : 58 - 58
[29] Self-Aligned Organic Thin-Film Transistors Employing UV-Curable Conductive Paste as a Source/Drain Electrode
Kim, Kang Dae
Lee, Taik Min
Jo, Jeong Dai
Choi, Byung Oh
Kim, Dong Soo
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2009, 54 (01) : 489 - 492
[30] Thermal Sensor Using Poly-Si Thin-Film Transistors With Self-Aligned and Offset Gate Structures
Kimura, Mutsumi
Taya, Jun
Nakashima, Akihiro
Sagawa, Yuki
IEEE SENSORS JOURNAL, 2013, 13 (05) : 1771 - 1774

← 1 2 3 4 5 →