共 50 条
- [21] A diffraction-based overlay model based on FDTD method METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXXIII, 2019, 10959
- [23] Accuracy of Diffraction-Based and Image-Based Overlay METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXV, PT 1 AND PT 2, 2011, 7971
- [24] Investigation of the operating mechanism of a diffraction-based sensor NANOSCALE IMAGING, SPECTROSCOPY, SENSING, AND ACTUATION FOR BIOMEDICAL APPLICATIONS IV, 2007, 6447
- [28] Diffraction-based interaction-free measurements Quantum Studies: Mathematics and Foundations, 2020, 7 : 145 - 153
- [29] Diffraction-based glasses for visually impaired people EMERGING DIGITAL MICROMIRROR DEVICE BASED SYSTEMS AND APPLICATIONS XVI, 2024, 12900
- [30] Diffraction-based assay for detecting multiple analytes Analytical and Bioanalytical Chemistry, 2002, 374 : 54 - 56