Optical components and actuators for integrated near-field optical data storage

被引：0

作者：

Hane, K ^{[1
]}

Kanamori, Y ^{[1
]}

Sasaki, M ^{[1
]}

Song, JH ^{[1
]}

机构：

[1] Tohoku Univ, Dept Mechatron & Precis Engn, Sendai, Miyagi 9808579, Japan

来源：

SMART SENSORS, ACTUATORS, AND MEMS, PTS 1 AND 2 | 2003年 / 5116卷

关键词：

optical MEMS; micro-probe; micro-stage; actuator; 3D lithography;

D O I：

10.1117/12.498885

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

Data-storage using near-field optical microscopy is a promising technology for the breakthrough of high-density optical disk memory since wavelength limit of conventional lens-optics is not applied. We have proposed a MEMS for the near-field optical data storage, which consists of integrated optical micro-probes and a micro media-translation-table. Three-dimensional lithography based on the bulk micromachining using resist spray coater is applied to the integration of waveguide, micro-pinhole tip, cantilever, and photodiode for the MEMS probes. The media-translation-table consists of the inverted scratch drive actuators (inverted SDAs) fabricated by surface micromachining.

引用

页码：197 / 204

页数：8

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