Optical components and actuators for integrated near-field optical data storage

被引：0
|
作者：
Hane, K [1 ]
Kanamori, Y [1 ]
Sasaki, M [1 ]
Song, JH [1 ]
机构：
[1] Tohoku Univ, Dept Mechatron & Precis Engn, Sendai, Miyagi 9808579, Japan
来源：
SMART SENSORS, ACTUATORS, AND MEMS, PTS 1 AND 2 | 2003年 / 5116卷
关键词：
optical MEMS; micro-probe; micro-stage; actuator; 3D lithography;
D O I：
10.1117/12.498885
中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
Data-storage using near-field optical microscopy is a promising technology for the breakthrough of high-density optical disk memory since wavelength limit of conventional lens-optics is not applied. We have proposed a MEMS for the near-field optical data storage, which consists of integrated optical micro-probes and a micro media-translation-table. Three-dimensional lithography based on the bulk micromachining using resist spray coater is applied to the integration of waveguide, micro-pinhole tip, cantilever, and photodiode for the MEMS probes. The media-translation-table consists of the inverted scratch drive actuators (inverted SDAs) fabricated by surface micromachining.
引用
收藏
页码：197 / 204
页数：8
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