SLIDING MODE CONTROL APPLICATION TO AMPLITUDE CONTROL OF COMB-ACTUATED RESONANT MICROSCANNERS

被引：0

作者：

Abtahi, Mansour ^{[1
]}

Vossoughi, Gholamreza ^{[1
]}

机构：

[1] Sharif Univ Technol, Dept Mech Engn, Ctr Excellence Design Robot & Automat CEDRA, Tehran, Iran

来源：

PROCEEDINGS OF THE ASME 10TH BIENNIAL CONFERENCE ON ENGINEERING SYSTEMS DESIGN AND ANALYSIS, 2010, VOL 5 | 2010年

关键词：

MICROMIRRORS;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

MOEMS (Micro-Opto-Electro-Mechanical System) are MEMS in which the optical part plays a dominant role. The use of MOEMS as scanners and projectors has been studied lately. For high speed scanning applications, electrostatic comb drive actuation has several advantages. In this paper, we demonstrate the application of sliding mode control scheme for amplitude control of comb-actuated resonant microscanners. This method that leads to a simple and practical control function is simply extendable for microscanners with other type of actuation and even for any kind of oscillators that need amplitude control. The functionality and performance of the presented scheme is verified using numerical.

引用

页码：633 / 638

页数：6

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