MEMS-based MHz silicon ultrasonic nozzles for production of monodisperse drops

被引：0
|
作者：
Song, Y. L. [1 ,2 ]
Cheng, Chih H.
Wang, Ning [1 ]
Tsai, Shirley C. [4 ]
Chou, Yuan F. [3 ]
Lee, Ching T. [2 ]
Tsai, Chen S. [1 ]
机构：
[1] Univ Calif Irvine, Irvine, CA 92697 USA
[2] Natl Cheng Kung Univ, Elect Engn, Tainan, Taiwan
[3] Natl Taiwan Univ, Mech Engn, Tainan, Taiwan
[4] Calif State Univ Long Beach, Chem Engn, Long Beach, CA 90840 USA
来源：
MICROELECTROMECHANICAL SYSTEMS - MATERIALS AND DEVICES | 2008年 / 1052卷
关键词：
ultrasonic atomization; MEMS; monodisperse drops; silicon nozzles; spray;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports production of 4.5 mu m-diameter monodisperse water drops using a micro electro-mechanical system (MEMS)-based 1 MHz 3-Fourier horn ultrasonic nozzle. The required electrical drive voltage for atomization was 6.5 V at 964 +/- 1 kHz that is in good agreements with the values obtained by impedance measurement and by the three-dimensional (3D) simulation using a commercial finite element analysis program. Such small diameter drops with geometrical standard deviation (GSD) as small as 1.2 and 90% inhale-able fine particle fraction (<5.8 mu m-diameter) were achieved in ultrasonic atomization for the first time. Therefore, the MEMS-based MHz ultrasonic nozzles should have potential application to targeted delivery of reproducible doses of medicine to the respiratory system.
引用
收藏
页码：305 / +
页数：2
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