MEMS-based MHz silicon ultrasonic nozzles for production of monodisperse drops

被引：0

作者：

Song, Y. L. ^{[1
,2
]}

Cheng, Chih H.

Wang, Ning ^{[1
]}

Tsai, Shirley C. ^{[4
]}

Chou, Yuan F. ^{[3
]}

Lee, Ching T. ^{[2
]}

Tsai, Chen S. ^{[1
]}

机构：

[1] Univ Calif Irvine, Irvine, CA 92697 USA

[2] Natl Cheng Kung Univ, Elect Engn, Tainan, Taiwan

[3] Natl Taiwan Univ, Mech Engn, Tainan, Taiwan

[4] Calif State Univ Long Beach, Chem Engn, Long Beach, CA 90840 USA

来源：

MICROELECTROMECHANICAL SYSTEMS - MATERIALS AND DEVICES | 2008年 / 1052卷

关键词：

ultrasonic atomization; MEMS; monodisperse drops; silicon nozzles; spray;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports production of 4.5 mu m-diameter monodisperse water drops using a micro electro-mechanical system (MEMS)-based 1 MHz 3-Fourier horn ultrasonic nozzle. The required electrical drive voltage for atomization was 6.5 V at 964 +/- 1 kHz that is in good agreements with the values obtained by impedance measurement and by the three-dimensional (3D) simulation using a commercial finite element analysis program. Such small diameter drops with geometrical standard deviation (GSD) as small as 1.2 and 90% inhale-able fine particle fraction (<5.8 mu m-diameter) were achieved in ultrasonic atomization for the first time. Therefore, the MEMS-based MHz ultrasonic nozzles should have potential application to targeted delivery of reproducible doses of medicine to the respiratory system.

引用

页码：305 / +

页数：2

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