共 50 条
- [31] Optimization of n+ μc-Si:H contact layer for low leakage current in a-Si:H thin film transistors JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2000, 18 (02): : 685 - 687
- [35] Characterization of PECVD silicon carbon oxynitride - Application to a-Si:H thin film transistor as a gate dielectric layer PROCEEDINGS OF THE ELEVENTH INTERNATIONAL SYMPOSIUM ON PLASMA PROCESSING, 1996, 96 (12): : 668 - 674
- [36] Measurements of potential sputtered H+ with 2D position sensitive detector PHYSICA SCRIPTA, 1999, T80B : 555 - 556
- [37] Fully self-aligned tri-layer a-Si:H thin-film transistors with deposited doped contact layer IEEE Electron Device Lett, 4 (124-126):