X-ray structural analysis of surface layers (Review)

The use of the x-ray diffractometry with Bragg - Brentano focusing and grazing-angle techniques in the study of surface (mainly polycrystalline) layers is reviewed. Techniques for determination of the effective thickness of the absorbing layer, geometric-aberration effects due to defocusing, and analysis of fine crystal structure parameters (including nondestructive depth profiling) are discussed. Issues concerned with determination of the phase composition, macrostresses, and average grain size in the surface layer are considered. X-ray diffraction methods for nondestructive evaluation of overlayers and films are described.