Comparative Analysis of Simulation Results and Experimental Data of Deflection of Silicon Membrane of MEMS Pressure Sensor

被引：0

作者：

Melnyk, Mykhaylo ^{[1
]}

Teslyuk, Vasyl ^{[1
]}

Dziuban, Jan ^{[2
]}

Knapkiewicz, Pawel ^{[2
]}

Kernytskyy, Andriy ^{[1
]}

Lobur, Myhailo ^{[1
]}

机构：

[1] Lviv Polytech Natl Univ, CAD Dept, 12 S Bandera St, Lvov, Ukraine

[2] Wroclaw Univ Technol, Div Microengn & Photovolta, Wroclaw, Poland

来源：

2015 XI INTERNATIONAL CONFERENCE ON PERSPECTIVE TECHNOLOGIES AND METHODS IN MEMS DESIGN (MEMSTECH) | 2015年

关键词：

pressure sensor; manufacturing technology; computer-aided design; MEMS; finite element method; multi-physics analysis;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The article presented research results of stressed and strained state of sensitive element of MEMS sensor depending on the pressure applied. A code for the ANSYS system was developed allowing to automate the process of constructing a solid model of pressure sensor and stressed and deformed state, taking into account technological features of their production. As a result of the program processing one gets graphical dependencies in the plate of the sensor and it's maximum displacement depending on the pressure applied. Experimental study of sensitive element of pressure sensor was conducted, which enable to compare simulation results with experimentally obtained.

引用

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页码：14 / 17

页数：4

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