Comparative Analysis of Simulation Results and Experimental Data of Deflection of Silicon Membrane of MEMS Pressure Sensor

被引：0

作者：

Melnyk, Mykhaylo ^{[1
]}

Teslyuk, Vasyl ^{[1
]}

Dziuban, Jan ^{[2
]}

Knapkiewicz, Pawel ^{[2
]}

Kernytskyy, Andriy ^{[1
]}

Lobur, Myhailo ^{[1
]}

机构：

[1] Lviv Polytech Natl Univ, CAD Dept, 12 S Bandera St, Lvov, Ukraine

[2] Wroclaw Univ Technol, Div Microengn & Photovolta, Wroclaw, Poland

来源：

2015 XI INTERNATIONAL CONFERENCE ON PERSPECTIVE TECHNOLOGIES AND METHODS IN MEMS DESIGN (MEMSTECH) | 2015年

关键词：

pressure sensor; manufacturing technology; computer-aided design; MEMS; finite element method; multi-physics analysis;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The article presented research results of stressed and strained state of sensitive element of MEMS sensor depending on the pressure applied. A code for the ANSYS system was developed allowing to automate the process of constructing a solid model of pressure sensor and stressed and deformed state, taking into account technological features of their production. As a result of the program processing one gets graphical dependencies in the plate of the sensor and it's maximum displacement depending on the pressure applied. Experimental study of sensitive element of pressure sensor was conducted, which enable to compare simulation results with experimentally obtained.

引用

页码：14 / 17

页数：4

共 50 条

[1] Simulation of Deflection and Stress for MEMS Pressure Sensor Based on Graphene
Jiang, Shengwei
Wang, Xuefang
Shi, Shuai
Yuan, Jiaojiao
Fang, Jing
Gao, Can
Liu, Sheng
[J]. 2013 14TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY (ICEPT), 2013, : 462 - +
[2] EXPERIMENTAL-DETERMINATION OF SILICON PRESSURE SENSOR DIAPHRAGM DEFLECTION
DJURIC, Z
MATIC, M
MATOVIC, J
PETROVIC, R
SIMICIC, N
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1990, 24 (03) : 175 - 179
[3] An MEMS Optical Fiber Pressure Sensor Based on a Square Silicon Diaphragm: Numerical Simulation and Experimental Verification
Li, Xue-jin
Qiu, Cheng-jun
Deng, Yuan-long
Qu, Wei
He, Jun-nan
[J]. INTERNATIONAL JOURNAL OF NONLINEAR SCIENCES AND NUMERICAL SIMULATION, 2010, 11 (03) : 225 - 229
[4] Design, Simulation and Analysis of MEMS Capacitive Pressure Sensor
See, Y. J.
Ismail, Mohd H.
[J]. 19TH IEEE STUDENT CONFERENCE ON RESEARCH AND DEVELOPMENT (SCORED 2021), 2021, : 262 - 266
[5] Analytical, numerical and experimental approach to analysis properties of a silicon membrane pressure sensor
Wymyslowski, A.
Gorecka-Drzazga, A.
Sarelo, K.
[J]. 2016 17TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME), 2016,
[6] LOW PRESSURE MEMS SENSOR: ANALYSIS AND EXPERIMENTAL DEMONSTRATION
Alattar, Basil
Ghommem, Mehdi
Hemid, Mohamed
[J]. 2023 22ND INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS, POWERMEMS 2023, 2023, : 256 - 259
[7] Study of MEMS and Silicon Pressure Sensor
Fan, Yanli
Li, Qing'en
[J]. 2012 2ND INTERNATIONAL CONFERENCE ON APPLIED ROBOTICS FOR THE POWER INDUSTRY (CARPI), 2012, : 144 - 146
[8] Load deflection analysis of rectangular graphene diaphragm for MEMS intracranial pressure sensor applications
S. H. A. Rahman
N. Soin
F. Ibrahim
[J]. Microsystem Technologies, 2018, 24 : 1147 - 1152
[9] Load deflection analysis of rectangular graphene diaphragm for MEMS intracranial pressure sensor applications
Rahman, S. H. A.
Soin, N.
Ibrahim, F.
[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2018, 24 (02): : 1147 - 1152
[10] Design, fabrication, testing and simulation of porous silicon based smart MEMS pressure sensor
Pramanik, C
Islam, T
Saha, H
Bhattacharya, J
Banerjee, S
Dey, S
[J]. 18TH INTERNATIONAL CONFERENCE ON VLSI DESIGN, PROCEEDINGS: POWER AWARE DESIGN OF VLSI SYSTEMS, 2005, : 235 - 240

← 1 2 3 4 5 →