Simulation of Deflection and Stress for MEMS Pressure Sensor Based on Graphene

被引：0
|
作者：
Jiang, Shengwei [1 ,2 ]
Wang, Xuefang [1 ,2 ]
Shi, Shuai [1 ,2 ]
Yuan, Jiaojiao [1 ,2 ]
Fang, Jing [1 ,2 ]
Gao, Can [3 ]
Liu, Sheng [1 ,2 ]
机构：
[1] Huazhong Univ Sci & Technol, Inst Microsyst, State Key Lab Digital Mfg Equipment & Technol, Sch Mech Sci & Engn, Wuhan 430074, Peoples R China
[2] Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Div MOEMS, Wuhan 430074, Peoples R China
[3] Huazhong Univ Sci & Technol, Sch Optoelect, Wuhan 430074, Peoples R China
来源：
2013 14TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY (ICEPT) | 2013年
关键词：
COMSOL; Graphene membrane; Maximum deflection distance; MEMS pressure sensors; FILMS; ROUTE;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, we conduct simulation of MEMS pressure sensors based on graphene membrane by using COMSOL finite element software and comparatively study the deflection and stress distribution of rectangular and circular vacuum cavities applied by a pressure. we also analyze the change rule of graphene membrane stress and maximum deflection distance for the two kinds of pressure sensor with different vacuum cavities. Simulation results show that only several layers graphene membrane can deflect greatly under a large pressure and the deflection changes linearly. Finally, we calculate the maximum stress and it is found to meet membrane strength requirement. These advantages predict that graphene has a huge potential for MEMS pressure sensors.
引用
收藏
页码：462 / +
页数：3
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