Nanostructured molybdenum oxide gas sensors

被引：0
|
作者：
Li, Y. X. [1 ]
Yang, Q. B. [1 ]
Yu, X. F. [1 ]
Trinchi, A. [2 ]
Sadek, A. Z. [3 ]
Wlodarski, W. [3 ]
Kalantar-Zadeh, K. [3 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Ceram, Shanghai 200050, Peoples R China
[2] CSIRO, Mfg & Mat Technol, Melbourne, Vic, Australia
[3] RMIT Univ, Sch Elect & Comp Engn, Melbourne, Vic, Australia
来源：
2006 IEEE SENSORS, VOLS 1-3 | 2006年
关键词：
D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
In this paper, we present a surface acoustic wave (SAW) gas sensor based on nano-structured molybdenum oxide (MoOx) thin film. The film was deposited onto a 36 degrees YX LiTaO3 SAW transducer, with an operating frequency of approximately 103 MHz, by thermal evaporation. The nanostructured MoOx film consists of connected nanorods with diameters of less than 100 nm. We compared devices with MoOx deposited by RF sputtering and thermal evaporation and found those with evaporated films have response that are an order of magnitude larger.
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页码：240 / +
页数：2
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