Nanostructured molybdenum oxide gas sensors

被引：0
|
作者：
Li, Y. X. [1 ]
Yang, Q. B. [1 ]
Yu, X. F. [1 ]
Trinchi, A. [2 ]
Sadek, A. Z. [3 ]
Wlodarski, W. [3 ]
Kalantar-Zadeh, K. [3 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Ceram, Shanghai 200050, Peoples R China
[2] CSIRO, Mfg & Mat Technol, Melbourne, Vic, Australia
[3] RMIT Univ, Sch Elect & Comp Engn, Melbourne, Vic, Australia
来源：
2006 IEEE SENSORS, VOLS 1-3 | 2006年
关键词：
D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
In this paper, we present a surface acoustic wave (SAW) gas sensor based on nano-structured molybdenum oxide (MoOx) thin film. The film was deposited onto a 36 degrees YX LiTaO3 SAW transducer, with an operating frequency of approximately 103 MHz, by thermal evaporation. The nanostructured MoOx film consists of connected nanorods with diameters of less than 100 nm. We compared devices with MoOx deposited by RF sputtering and thermal evaporation and found those with evaporated films have response that are an order of magnitude larger.
引用
收藏
页码：240 / +
页数：2
相关论文
共 50 条
  • [21] On the selectivity of nanostructured semiconductor gas sensors
    Heszler, P.
    Ionescu, R.
    Llobet, E.
    Reyes, L. F.
    Smulko, J. M.
    Kish, L. B.
    PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2007, 244 (11): : 4331 - 4335
  • [22] Gas sensors based on nanostructured materials
    Jimenez-Cadena, Giselle
    Riu, Jordi
    Rius, F. Xavier
    ANALYST, 2007, 132 (11) : 1083 - 1099
  • [23] Nanostructured ZnO chemical gas sensors
    Galstyan, Vardan
    Comini, Elisabetta
    Baratto, Camilla
    Faglia, Guido
    Sberveglieri, Giorgio
    CERAMICS INTERNATIONAL, 2015, 41 (10) : 14239 - 14244
  • [24] Novel printed nanostructured gas sensors
    Kukkola, J.
    Jansson, E.
    Popov, A.
    Lappalainen, J.
    Maklin, J.
    Halonen, N.
    Toth, G.
    Shchukarev, A.
    Mikkola, J. -P.
    Jantunen, H.
    Kordas, K.
    Hast, J.
    Hassinen, T.
    Sunnari, A.
    Jokinen, K.
    Haverinen, H.
    Sliz, R.
    Jabbour, G.
    Fabritius, T.
    Myllyla, R.
    Vasiliev, A.
    Zaretskiy, N.
    EUROSENSORS XXV, 2011, 25
  • [25] Molybdenum oxide bronzes as pH sensors
    Shuk, P
    Ramanujachary, KV
    Greenblatt, M
    ELECTROCHIMICA ACTA, 1996, 41 (13) : 2055 - 2058
  • [26] Molybdenum oxide bronzes as pH sensors
    Shuk, P.
    Ramanujachary, K.V.
    Greenblatt, M.
    Pergamon Press Inc, Tarrytown, NY, United States (41):
  • [27] Gas sensing behavior of nanostructured sensors based on tin oxide synthesized with different methods
    Vaezi, M. R.
    Sadrnezhaad, S. K.
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2007, 140 (1-2): : 73 - 80
  • [28] Oxygen Defects in Nanostructured Metal-Oxide Gas Sensors: Recent Advances and Challenges†
    Ding, Wenjie
    Liu, Dandan
    Liu, Jiajia
    Zhang, Jiatao
    CHINESE JOURNAL OF CHEMISTRY, 2020, 38 (12) : 1832 - 1846
  • [29] Novel zinc oxide nanostructured thin films for volatile organic compaunds gas sensors
    Shishiyanu, T.
    Shishiyanu, S.
    Lupan, O.
    Ontea, V.
    Bragorenco, A.
    2006 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOLS 1 AND 2, 2007, : 201 - +
  • [30] Array of chromium doped nanostructured TiO2 metal oxide gas sensors
    Gwizdz, P.
    Radecka, M.
    Zakrzewska, K.
    28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014), 2014, 87 : 1059 - 1062
12345