The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications

被引：11
|
作者：
Wang, Ye [1 ,2 ]
Fu, Xiuhua [1 ]
Chen, Yongyi [2 ,3 ]
Qin, Li [2 ]
Ning, Yongqiang [2 ]
Wang, Lijun [2 ,4 ,5 ]
机构：
[1] Changchun Univ Sci & Technol, Sch Optoelect Engn, Changchun 130022, Peoples R China
[2] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Changchun 130033, Peoples R China
[3] Jlight Semicond Technol Co Ltd, ETDZ, 1783 Zibo Rd, Changchun 130102, Peoples R China
[4] Peng Cheng Lab, 2,Xingke 1st St, Shenzhen 518000, Peoples R China
[5] Hainan Normal Univ, Academician Team Innovat Ctr Hainan Prov, Sch Phys & Elect Engn, Key Lab Laser Technol & Optoelect Funct Mat Haina, Haikou 570206, Hainan, Peoples R China
来源：
APPLIED SCIENCES-BASEL | 2022年 / 12卷 / 13期
基金：
中国国家自然科学基金;
关键词：
metal-film grating; multilayer-dielectric-film grating; grating preparation technology; diffraction efficiency; laser-induced damage threshold; diffraction grating; LASER-INDUCED DAMAGE; EFFICIENT TRANSMISSION GRATINGS; DIELECTRIC REFLECTION GRATINGS; GOLD-COATED GRATINGS; WIRE-GRID POLARIZER; FUSED-SILICA; FABRICATION; DESIGN; MULTILAYER; COMPRESSION;
D O I：
10.3390/app12136503
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
The high-precision diffraction grating is an important chromatic dispersion component that has been widely used in many fields, including laser beam combining, chirped pulse compression, spectroscopy, among others. In this paper, we review the development status of reflection and transmission gratings with high diffraction efficiency and high laser-induced damage thresholds, such as metal-film and multilayer-dielectric-film gratings. Then, we review the basic principles and most recent stages in the development of manufacturing techniques, such as mechanical scribing, holographic exposure, electron-beam lithography, and nanoimprinting.
引用
收藏
页数：31
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