The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications

被引：11

作者：

Wang, Ye ^{[1
,2
]}

Fu, Xiuhua ^{[1
]}

Chen, Yongyi ^{[2
,3
]}

Qin, Li ^{[2
]}

Ning, Yongqiang ^{[2
]}

Wang, Lijun ^{[2
,4
,5
]}

机构：

[1] Changchun Univ Sci & Technol, Sch Optoelect Engn, Changchun 130022, Peoples R China

[2] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Changchun 130033, Peoples R China

[3] Jlight Semicond Technol Co Ltd, ETDZ, 1783 Zibo Rd, Changchun 130102, Peoples R China

[4] Peng Cheng Lab, 2,Xingke 1st St, Shenzhen 518000, Peoples R China

[5] Hainan Normal Univ, Academician Team Innovat Ctr Hainan Prov, Sch Phys & Elect Engn, Key Lab Laser Technol & Optoelect Funct Mat Haina, Haikou 570206, Hainan, Peoples R China

来源：

APPLIED SCIENCES-BASEL | 2022年 / 12卷 / 13期

基金：

中国国家自然科学基金;

关键词：

metal-film grating; multilayer-dielectric-film grating; grating preparation technology; diffraction efficiency; laser-induced damage threshold; diffraction grating; LASER-INDUCED DAMAGE; EFFICIENT TRANSMISSION GRATINGS; DIELECTRIC REFLECTION GRATINGS; GOLD-COATED GRATINGS; WIRE-GRID POLARIZER; FUSED-SILICA; FABRICATION; DESIGN; MULTILAYER; COMPRESSION;

D O I：

10.3390/app12136503

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The high-precision diffraction grating is an important chromatic dispersion component that has been widely used in many fields, including laser beam combining, chirped pulse compression, spectroscopy, among others. In this paper, we review the development status of reflection and transmission gratings with high diffraction efficiency and high laser-induced damage thresholds, such as metal-film and multilayer-dielectric-film gratings. Then, we review the basic principles and most recent stages in the development of manufacturing techniques, such as mechanical scribing, holographic exposure, electron-beam lithography, and nanoimprinting.

引用

页数：31

共 50 条

[31] Progress in spectroscopic ellipsometry: Applications from vacuum ultraviolet to infrared
Hilfiker, JN
Bungay, CL
Synowicki, RA
Tiwald, TE
Herzinger, CM
Johs, B
Pribil, GK
Woollam, JA
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2003, 21 (04): : 1103 - 1108
[32] Electrochemically tunable surface-plasmon-enhanced diffraction gratings and their (bio-)sensing applications
Tian, SJ
Armstrong, NR
Knoll, W
LANGMUIR, 2005, 21 (10) : 4656 - 4660
[33] Forming technology and research progress of material surface micropattern structure
Pei, Yunliang
Yao, Yu
Zou, Wenjun
Peng, Jin
Song, Xudong
CAILIAO GONGCHENG-JOURNAL OF MATERIALS ENGINEERING, 2024, 52 (04): : 87 - 101
[34] Surface Technology for Polymer Parts for Space Applications made by Additive Manufacturing
Dietz, Andreas
van der Veen, Egbert
Rauch, Bernd
Schlitt, Reinhard
2018 IEEE AEROSPACE CONFERENCE, 2018,
[35] Development of Laser Additive Manufacturing Technology and Its Application Progress in Aerospace Field
Ni J.
Zhou Q.
Yi F.
Dong P.
Chen S.
Li Q.
Xiyou Jinshu/Chinese Journal of Rare Metals, 2022, 46 (10): : 1365 - 1382
[36] Bacillus subtilis surface display technology: applications in bioprocessing and sustainable manufacturing
Howra Bahrulolum
Gholamreza Ahmadian
Biotechnology for Biofuels and Bioproducts, 18 (1):
[37] Special Topic:Collaborative Manufacturing Technology of Structure Shape and Surface Integrity
Zhongde SHAN
Wenfeng DING
Jun WANG
Chinese Journal of Aeronautics, 2023, (07) : 3 - 3
[38] Special Topic:Collaborative Manufacturing Technology of Structure Shape and Surface Integrity
Zhongde SHAN
Wenfeng DING
Jun WANG
Chinese Journal of Aeronautics, 2023, 36 (07) : 3
[39] Self-diffraction from surface relief thermal gratings in a photorefractive BSO crystal
Ramos-García, R
Domínguez-Cruz, R
OPTICS COMMUNICATIONS, 2001, 189 (4-6) : 389 - 394
[40] Overview of technology computer-aided design tools and applications in technology development, manufacturing and design
Fichtner, Wolfgang
JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE, 2008, 5 (06) : 1089 - 1105

← 1 2 3 4 5 →