The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications

被引：11
|
作者：
Wang, Ye [1 ,2 ]
Fu, Xiuhua [1 ]
Chen, Yongyi [2 ,3 ]
Qin, Li [2 ]
Ning, Yongqiang [2 ]
Wang, Lijun [2 ,4 ,5 ]
机构：
[1] Changchun Univ Sci & Technol, Sch Optoelect Engn, Changchun 130022, Peoples R China
[2] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Changchun 130033, Peoples R China
[3] Jlight Semicond Technol Co Ltd, ETDZ, 1783 Zibo Rd, Changchun 130102, Peoples R China
[4] Peng Cheng Lab, 2,Xingke 1st St, Shenzhen 518000, Peoples R China
[5] Hainan Normal Univ, Academician Team Innovat Ctr Hainan Prov, Sch Phys & Elect Engn, Key Lab Laser Technol & Optoelect Funct Mat Haina, Haikou 570206, Hainan, Peoples R China
来源：
APPLIED SCIENCES-BASEL | 2022年 / 12卷 / 13期
基金：
中国国家自然科学基金;
关键词：
metal-film grating; multilayer-dielectric-film grating; grating preparation technology; diffraction efficiency; laser-induced damage threshold; diffraction grating; LASER-INDUCED DAMAGE; EFFICIENT TRANSMISSION GRATINGS; DIELECTRIC REFLECTION GRATINGS; GOLD-COATED GRATINGS; WIRE-GRID POLARIZER; FUSED-SILICA; FABRICATION; DESIGN; MULTILAYER; COMPRESSION;
D O I：
10.3390/app12136503
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
The high-precision diffraction grating is an important chromatic dispersion component that has been widely used in many fields, including laser beam combining, chirped pulse compression, spectroscopy, among others. In this paper, we review the development status of reflection and transmission gratings with high diffraction efficiency and high laser-induced damage thresholds, such as metal-film and multilayer-dielectric-film gratings. Then, we review the basic principles and most recent stages in the development of manufacturing techniques, such as mechanical scribing, holographic exposure, electron-beam lithography, and nanoimprinting.
引用
收藏
页数：31
相关论文
共 50 条
  • [1] Surface-micromachined diffraction gratings for scanning spectroscopic applications
    Kiang, MH
    Nee, JT
    Lau, KY
    Muller, RS
    TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 1997, : 343 - 345
  • [2] High-end spectroscopic diffraction gratings: design and manufacturing
    Glaser, Tilman
    ADVANCED OPTICAL TECHNOLOGIES, 2015, 4 (01) : 25 - 46
  • [3] TECHNOLOGY AND APPLICATIONS OF SUBMICRON PERIOD DIFFRACTION GRATINGS
    Tamulevicius, T.
    Andrulevicius, M.
    Sileikaite, A.
    Puodziukynas, L.
    Morkunas, V.
    Tamulevicius, S.
    INTERNATIONAL CONFERENCE ON RADIATION INTERACTION WITH MATERIALS AND ITS USE IN TECHNOLOGIES 2008, 2008, : 66 - 71
  • [4] Development and applications of the pioneering technology of structure refinement from powder diffraction data
    Izumi, F
    JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 2003, 111 (09) : 617 - 623
  • [5] New Progress and Development Trend of Manufacturing of Functional Surface Structure
    Tang, Heng
    Tang, Yong
    Wu, Xiaoyu
    Yuan, Wei
    Sun, Yalong
    Lu, Yanjun
    Peng, Ruitao
    Jixie Gongcheng Xuebao/Journal of Mechanical Engineering, 2022, 58 (11): : 183 - 199
  • [6] MANUFACTURE OF LENSES AND DIFFRACTION GRATINGS USING DLP AS AN ADDITIVE MANUFACTURING TECHNOLOGY
    Vallejo Melgarejo, Laura Daniela
    Garcia, Jose
    Reifenberger, Ronald G.
    Newell, Brittany
    PROCEEDINGS OF THE ASME CONFERENCE ON SMART MATERIALS, ADAPTIVE STRUCTURES AND INTELLIGENT SYSTEMS, 2017, VOL 2, 2018,
  • [7] Progress of Additive Manufacturing Technology and Its Medical Applications
    Bastin, Anne
    Huang, Xiao
    ASME Open Journal of Engineering, 2022, 1 (01):
  • [8] Science and Technology of Additive Manufacturing Progress: Processes, Materials, and Applications
    Vahid Monfared
    Seeram Ramakrishna
    Navid Nasajpour-Esfahani
    Davood Toghraie
    Maboud Hekmatifar
    Sadegh Rahmati
    Metals and Materials International, 2023, 29 : 3442 - 3470
  • [9] Science and Technology of Additive Manufacturing Progress: Processes, Materials, and Applications
    Monfared, Vahid
    Ramakrishna, Seeram
    Nasajpour-Esfahani, Navid
    Toghraie, Davood
    Hekmatifar, Maboud
    Rahmati, Sadegh
    METALS AND MATERIALS INTERNATIONAL, 2023, 29 (12) : 3442 - 3470
  • [10] Development of diffraction gratings and grisms engraved by photolithography for NIR space applications
    Floriot, J.
    Martin, L.
    Pamplona, T.
    Basa, S.
    ADVANCES IN OPTICAL AND MECHANICAL TECHNOLOGIES FOR TELESCOPES AND INSTRUMENTATION V, 2022, 12188
12345