Experimental Investigation of Thermally Induced Nonlinearities in Aluminum Nitride Contour-Mode MEMS Resonators

被引：22
|
作者：
Tazzoli, Augusto [1 ]
Rinaldi, Matteo [2 ]
Piazza, Gianluca [1 ,3 ]
机构：
[1] Univ Penn, Dept Elect & Syst Engn, Philadelphia, PA 19104 USA
[2] Northeastern Univ, Dept Elect & Comp Engn, Boston, MA 02115 USA
[3] Carnegie Mellon Univ, Dept Elect & Comp Engn, Pittsburgh, PA 15213 USA
来源：
IEEE ELECTRON DEVICE LETTERS | 2012年 / 33卷 / 05期
关键词：
Aluminum nitride contour-mode resonator; MEMS; nonlinearity; self-heating;
D O I：
10.1109/LED.2012.2188491
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The aim of this letter is to experimentally demonstrate that the source of amplitude-frequency (A-f) nonlinearities in aluminum nitride contour-mode MEMS resonators is to be attributed to the softening of the equivalent device Young's modulus due to self-heating effects. Resonators with a center frequency of about 1.16 GHz are here investigated as a case study. The resonator self-heating was evaluated by integrating a platinum serpentine in the resonator body and using it as an efficient temperature sensor. The observations of this work are supported by the comparison of the shift of the A-f plots measured at different ambient temperatures with the direct recording of the resonator-temperature increase during VNA frequency sweeps.
引用
收藏
页码：724 / 726
页数：3
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