Metal surface structuring with spatiotemporally focused femtosecond laser pulses

被引：12

作者：

Tan, Yuanxin ^{[1
,2
]}

Chu, Wei ^{[1
]}

Lin, Jintian ^{[1
]}

Fang, Zhiwei ^{[1
,2
,3
]}

Liao, Yang ^{[1
]}

Cheng, Ya ^{[1
,4
,5
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China

[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China

[3] ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 200031, Peoples R China

[4] East China Normal Univ, State Key Lab Precis Spect, Shanghai 200062, Peoples R China

[5] Shanxi Univ, Collaborat Innovat Ctr Extreme Opt, Taiyuan 030006, Shanxi, Peoples R China

来源：

JOURNAL OF OPTICS | 2018年 / 20卷 / 01期

基金：

中国国家自然科学基金;

关键词：

spatiotemporal focusing; femtosecond laser micromachining; surface structuring; ABLATION;

D O I：

10.1088/2040-8986/aa9dc6

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Femtosecond laser micromachining provides high precision and less thermal diffusion in surface structuring as a result of the ultrashort duration and ultrahigh peak intensity of the femtosecond laser pulses. To increase the throughput of surface patterning, the focal spot size can be expanded with loose focusing, which, however, could lead to nonlinear self-focusing of the pulses when the pulses propagate in air. We solve the problem by use of spatiotemporally focused femtosecond laser pulses for ablation of metal surfaces, which gives rise to improved surface quality as compared with that obtained with the conventional focusing scheme.

引用

页数：7

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