Sub-micron structuring of solid targets with femtosecond laser pulses

被引：0
|
作者：
Korte, F [1 ]
Nolte, S [1 ]
Chichkov, BN [1 ]
Fallnich, C [1 ]
Tünnermann, A [1 ]
Welling, H [1 ]
机构：
[1] Laser Zentrum Hannover EV, D-30419 Hannover, Germany
来源：
LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING VI | 2001年 / 4274卷
关键词：
ultrafast lasers; microstructure fabrication;
D O I：
10.1117/12.432502
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Possibilities to fabricate sub-micron structures in thin metal films, metal coatings, and glass substrates using femtosecond laser pulses are systematically studied. Structures are produced by direct femtosecond-pulse laser ablation of solid targets at atmospheric pressure. Tight focusing and imaging techniques are applied. Dependencies of the structure size on laser pulse energy and pulse number are investigated.
引用
收藏
页码：110 / 115
页数：2
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