Dynamics of a micro-electro-mechanical system associated with an atomic force microscope considering squeeze film damping

被引：2
|
作者：
Duque, Johan S. [1 ,2 ]
Gutierrez, Alexander [1 ]
Cortes, Daniel [1 ]
机构：
[1] Univ Tecnol Pereira, Dept Matemat, Carrera 27 10-02,AA 97, Barrio Alamos 660003, Risaralda, Colombia
[2] Univ Tecnol Uruguay, Agrienvironm Engn, CIMTE, Francisco Antonio Maciel S-N, Durazno 97000, Uruguay
来源：
APPLIED OPTICS | 2020年 / 59卷 / 13期
关键词：
DEFORMATION; REMOVAL;
D O I：
10.1364/AO.383485
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In the following paper, we present a nonlinear model of an atomic force microscope considering the potential of Lennard-Jones and the nonlinear friction produced by the squeeze film damping effect, between the cantilever and the sample. Specifically, we study the existence and stability of periodic solutions using the lower and upper solution method in the system without friction. The condition for persistence of the homocline orbit was established by Melnikov method when the model has nonlinear friction. In this sense, the analytic and numerical approach is presented to verify the solutions of the model. (C) 2020 Optical Society of America
引用
收藏
页码：D76 / D80
页数：5
相关论文
共 50 条
  • [31] Modeling and simulation for electrostatically driven micro-electro-mechanical (MEMS) system
    Ha, T
    Kwon, O
    Kim, J
    Oh, J
    Won, T
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2003, 42 : S676 - S680
  • [32] Magnetic energy coupling system based on micro-electro-mechanical system coils
    Li, Xiuhan
    Yuan, Quan
    Yang, Tianyang
    Liu, Jian
    Zhang, Haixia
    JOURNAL OF APPLIED PHYSICS, 2012, 111 (07)
  • [33] Chaos and Nonlinear Feedback Control of the Arch Micro-Electro-Mechanical System
    LUO Shaohua
    LI Shaobo
    TAJADDODIANFAR Farid
    Journal of Systems Science & Complexity, 2018, 31 (06) : 1510 - 1524
  • [34] Datacenter network based on Micro-Electro-Mechanical System optical switching
    Jiang, Weicheng
    Li, Lanying
    Li, Yong
    Guo, Weishu
    PROCEEDINGS OF THE 2017 7TH INTERNATIONAL CONFERENCE ON MANUFACTURING SCIENCE AND ENGINEERING (ICMSE 2017), 2017, 128 : 17 - 21
  • [35] Pulse breakdown characteristics of microscale gap in micro-electro-mechanical system
    You, Xiaoguang
    Cheng, Yonghong
    Meng, Guodong
    Wu, Kai
    Meng, Yongpeng
    Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams, 2013, 25 (07): : 1867 - 1872
  • [36] Bending properties of a flexible micro-electro-mechanical system array antenna
    Cong, Lin
    Xu, Lixin
    Han, Qi
    Dong, Tao
    9TH INTERNATIONAL CONFERENCE ON MICROWAVE AND MILLIMETER WAVE TECHNOLOGY (ICMMT 2016) PROCEEDINGS, VOL 2, 2016, : 722 - 724
  • [37] Asymptotic properties of quenching for the quasilinear electrostatic micro-electro-mechanical system
    Zhu, Liping
    He, Shujuan
    MODERN PHYSICS LETTERS B, 2021, 35 (16):
  • [38] Chaos and Nonlinear Feedback Control of the Arch Micro-Electro-Mechanical System
    Luo Shaohua
    Li Shaobo
    Tajaddodianfar, Farid
    JOURNAL OF SYSTEMS SCIENCE & COMPLEXITY, 2018, 31 (06) : 1510 - 1524
  • [39] Fatigue of LIGA Ni micro-electro-mechanical system thin films
    Yang, Y.
    Allameh, S.
    Lou, J.
    Imasogie, B.
    Boyce, B. L.
    Soboyejo, W. O.
    METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 2007, 38A (13): : 2340 - 2348
  • [40] Chaos and Nonlinear Feedback Control of the Arch Micro-Electro-Mechanical System
    Shaohua Luo
    Shaobo Li
    Farid Tajaddodianfar
    Journal of Systems Science and Complexity, 2018, 31 : 1510 - 1524
12345