Dynamics of a micro-electro-mechanical system associated with an atomic force microscope considering squeeze film damping

被引：2

作者：

Duque, Johan S. ^{[1
,2
]}

Gutierrez, Alexander ^{[1
]}

Cortes, Daniel ^{[1
]}

机构：

[1] Univ Tecnol Pereira, Dept Matemat, Carrera 27 10-02,AA 97, Barrio Alamos 660003, Risaralda, Colombia

[2] Univ Tecnol Uruguay, Agrienvironm Engn, CIMTE, Francisco Antonio Maciel S-N, Durazno 97000, Uruguay

来源：

APPLIED OPTICS | 2020年 / 59卷 / 13期

关键词：

DEFORMATION; REMOVAL;

D O I：

10.1364/AO.383485

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In the following paper, we present a nonlinear model of an atomic force microscope considering the potential of Lennard-Jones and the nonlinear friction produced by the squeeze film damping effect, between the cantilever and the sample. Specifically, we study the existence and stability of periodic solutions using the lower and upper solution method in the system without friction. The condition for persistence of the homocline orbit was established by Melnikov method when the model has nonlinear friction. In this sense, the analytic and numerical approach is presented to verify the solutions of the model. (C) 2020 Optical Society of America

引用

页码：D76 / D80

页数：5

共 50 条

[21] Packaging technology of micro-electro-mechanical system by vacuum welding
Guan, Rongfeng
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology, 2008, 28 (03): : 275 - 279
[22] Photoacoustic Imaging by Use of Micro-Electro-Mechanical System Scanner
Chen S.-L.
Journal of Shanghai Jiaotong University (Science), 2018, 23 (1) : 1 - 10
[23] Dynamic characteristics of a micro-mechanical-resonator with squeeze film damping
Zhang, Qi-Chang
Zhou, Fan-Sen
Wang, Wei
Zhendong yu Chongji/Journal of Vibration and Shock, 2015, 34 (17): : 124 - 130
[24] DAMPING FORCES EXERTED BY RAREFIED GAS MIXTURES IN MICRO-ELECTRO-MECHANICAL SYSTEM DEVICES VIBRATING AT HIGH FREQUENCIES
Bisi, Marzia
Lorenzani, Silvia
INTERFACIAL PHENOMENA AND HEAT TRANSFER, 2014, 2 (03) : 253 - 263
[25] Magnetostrictive thin-film transducer elements for micro-electro-mechanical systems
Karl, WJ
Watts, R
Powell, AL
Whitehouse, CR
Yates, RB
Gibbs, MRJ
PROCEEDINGS OF THE FIFTH INTERNATIONAL SYMPOSIUM ON MAGNETIC MATERIALS, PROCESSES, AND DEVICES: APPLICATIONS TO STORAGE AND MICROELECTROMECHANICAL SYSTEMS (MEMS), 1999, 98 (20): : 354 - 367
[26] Examination of a micro-electro-mechanical system based on a portable respiratory monitoring system
Jiwon Sung
Myonggeun Yoon
Hyun Do Huh
Dong Oh Shin
Weon Kuu Chung
Dong Wook Kim
Journal of the Korean Physical Society, 2015, 67 : 752 - 756
[27] Quantum control spectroscopy (QCS) with a micro-electro-mechanical system (MEMS)
Buckup, T.
Moehring, J.
Motzkus, M.
MEMS ADAPTIVE OPTICS III, 2009, 7209
[28] Fatigue of LIGA Ni Micro-Electro-Mechanical System Thin Films
Y. Yang
S. Allameh
J. Lou
B. Imasogie
B.L. Boyce
W.O. Soboyejo
Metallurgical and Materials Transactions A, 2007, 38 : 2340 - 2348
[29] Examination of a micro-electro-mechanical system based on a portable respiratory monitoring system
Sung, Jiwon
Yoon, Myonggeun
Do Huh, Hyun
Shin, Dong Oh
Chung, Weon Kuu
Kim, Dong Wook
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2015, 67 (04) : 752 - 756
[30] A Novel Approach for Micro-electro-mechanical System(MEMS) Vacuum Packaging
WANG Cheng-gang
International Journal of Plant Engineering and Management, 2008, (03) : 148 - 153

← 1 2 3 4 5 →