Dynamics of a micro-electro-mechanical system associated with an atomic force microscope considering squeeze film damping

被引：2

作者：

Duque, Johan S. ^{[1
,2
]}

Gutierrez, Alexander ^{[1
]}

Cortes, Daniel ^{[1
]}

机构：

[1] Univ Tecnol Pereira, Dept Matemat, Carrera 27 10-02,AA 97, Barrio Alamos 660003, Risaralda, Colombia

[2] Univ Tecnol Uruguay, Agrienvironm Engn, CIMTE, Francisco Antonio Maciel S-N, Durazno 97000, Uruguay

来源：

APPLIED OPTICS | 2020年 / 59卷 / 13期

关键词：

DEFORMATION; REMOVAL;

D O I：

10.1364/AO.383485

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In the following paper, we present a nonlinear model of an atomic force microscope considering the potential of Lennard-Jones and the nonlinear friction produced by the squeeze film damping effect, between the cantilever and the sample. Specifically, we study the existence and stability of periodic solutions using the lower and upper solution method in the system without friction. The condition for persistence of the homocline orbit was established by Melnikov method when the model has nonlinear friction. In this sense, the analytic and numerical approach is presented to verify the solutions of the model. (C) 2020 Optical Society of America

引用

页码：D76 / D80

页数：5

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