Resistive switching and synaptic behaviors of an HfO2/Al2O3 stack on ITO for neuromorphic systems

被引:60
|
作者
Mahata, Chandreswar [1 ]
Lee, Changmin [2 ]
An, Youngseo [2 ]
Kim, Min-Hwi [3 ,4 ]
Bang, Suhyun [3 ,4 ]
Kim, Chae Soo [3 ,4 ]
Ryu, Ji-Ho [1 ]
Kim, Sungjun [5 ]
Kim, Hyoungsub [2 ]
Park, Byung-Gook [3 ,4 ]
机构
[1] Chungbuk Natl Univ, Sch Elect Engn, Cheongju 28644, South Korea
[2] Sungkyunkwan Univ, Sch Adv Mat Sci & Engn, Suwon 16419, South Korea
[3] Seoul Natl Univ, ISRC, Seoul 08826, South Korea
[4] Seoul Natl Univ, Dept Elect & Comp Engn, Seoul 08826, South Korea
[5] Dongguk Univ, Div Elect & Elect Engn, Seoul 04620, South Korea
基金
新加坡国家研究基金会;
关键词
ITO electrode; HfO2/Al2O3; RRAM; Synaptic devices; RRAM DEVICES; THIN-FILMS; MEMORY; RESISTANCE; OXYGEN; MECHANISMS; DEPOSITION; LAYER;
D O I
10.1016/j.jallcom.2020.154434
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
This work reports on the bipolar resistive switching (RS) characteristics and possible applicability to transparent synaptic devices when an ultrathin Al2O3 interfacial layer is introduced between HfO2 and an indium tin oxide (ITO) bottom electrode for an RS device (TaN/HfO2/Al2O3/ITO). The introduction of the Al2O3 interfacial layer on ITO allows for a more gradual current change during the RESET process. As a result, the bilayer RS device offers multilevel resistance states with reasonable controllability under the application of various DC and pulse voltages. Considering the systematic changes in the resistance in accordance with the negative/positive voltage pulses during the potentiation/depression processes, as well as the reasonable spike-timing-dependent plasticity characteristics, the proposed RS bilayer on ITO is a potential candidate for transparent synaptic devices in neuromorphic systems. (C) 2020 Elsevier B.V. All rights reserved.
引用
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页数:8
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