Effect of electrode and substrate on the fatigue behavior of PZT thick films fabricated by aerosol deposition

被引：17

作者：

Han, Guifang ^{[1
]}

Ryu, Jungho ^{[1
]}

Yoon, Woon-Ha ^{[1
]}

Choi, Jong-Jin ^{[1
]}

Hahn, Byung-Dong ^{[1
]}

Kim, Jong-Woo ^{[1
]}

Park, Dong-Soo ^{[1
]}

机构：

[1] KIMS, Funct Ceram Grp, Chang Won 641831, Gyeongnam, South Korea

来源：

CERAMICS INTERNATIONAL | 2012年 / 38卷

关键词：

Film; Fatigue; PZT; Aerosol-deposition (AD); FERROELECTRIC PROPERTIES; ELECTRICAL-PROPERTIES; CAPACITORS; LANIO3;

D O I：

10.1016/j.ceramint.2011.04.092

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

10 mu m-thick lead zirconate titanate (PZT) films with identical LaNiO3 (LNO) top and bottom electrodes were fabricated on silicon and yttria-stabilized zirconia (YSZ) substrates by aerosol deposition (AD). A Pt electrode was also made for comparison. The dielectric, ferroelectric and fatigue behaviors at different fields were investigated. The PZT films on YSZ/LNO showed the highest dielectric and ferroelectric properties and good fatigue behavior under various fields. PZT films with a Pt electrode also showed good fatigue behavior up to 10(8) cycles as thicker film can minimize the effect of defect entrapment near the interface. (C) 2011 Elsevier Ltd and Techna Group S.r.l. All rights reserved.

引用

页码：S241 / S244

页数：4

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