Thermal conductivity of nanocrystalline alumina films fabricated by aerosol deposition

Films fabricated by aerosol deposition (AD) are expected to be used as electrical insulating coatings. High thermal conductivity is required in addition to electrical insulation properties for electrical insulation substrate applications, but the thermal conductivity of AD films has not been reported. AD films are nanocrystalline films consisting of crystals several tens of nanometers in size, and it is unclear what effect the small particle size has on thermal conductivity. In this study, the thermal conductivity of an AD alumina film was measured by the light flash method as 15 - 31 W m -1 K -1 at room temperature and was large despite the particle size of several tens of nanometers. Analysis was performed using a model of grain size effects on thermal conductivity.