Measuring and calculating the hall mobility of semiconductor epitaxial layers by a contactless method

A new probe was made from microwave dielectric waveguides. Using this probe, we can measure the magnetoresistance of AlxGa1-xAs, Hg1-xCdxTe and other epitaxial layers easily. It is a contactless and non-destructive method. During the test, we do not need to specially treat the surface and the shape of the samples. The measuring area is about 4 x 4 mm(2). This article also presents a method of calculating the mobility of these samples from the magnetoresistance data for different semiconductor materials. (C) 1997 Elsevier Science Ltd.