A novel aspheric surface testing method using part-compensating lens

被引:12
|
作者
Liu, HL [1 ]
Hao, Q [1 ]
Zhu, QD [1 ]
Sha, DG [1 ]
Zhang, CX [1 ]
机构
[1] Beihang Univ, Dept Photoelect Engn, Beijing 100083, Peoples R China
关键词
aspheric surface testing; part-compensating lens; interferometry; calibrating lens;
D O I
10.1117/12.578624
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
In contrast to null compensator method in aspheric surface testing, a novel method is presented that uses part-compensating lens and digital moire phase-shift interferometry. Researches are made on measurement principle, design method of part-compensating lens and calibrating lens, and calibrating method. Experiment is made by using spherical surface to simulate aspheric surface testing. The measurement precision is that the P-V value of the testing error can be lambda/10. Using the method presented in this paper, the structure of compensator is much simpler than that of C, null compensator. And one part-compensating lens can be used to test different aspheric surfaces in certain range.
引用
收藏
页码:324 / 329
页数:6
相关论文
共 50 条
  • [41] Fabrication of aspheric micro-lens mold with high aspect ratio method to form small 3D Structures with an arbitrary aspheric surface and high aspect ratio
    Naniwa, Irizo
    Kanamaru, Masatoshi
    Nakamura, Shigeo
    Shimano, Takeshi
    Horino, Masaya
    IEEJ Transactions on Sensors and Micromachines, 2009, 129 (11) : 426 - 429
  • [42] TESTING OF ASPHERIC SURFACES WITH COMPUTER-GENERATED HOLOGRAM BY USING A NOVEL INTERFEROMETRIC SET-UP
    TANG, YT
    CHANG, MW
    CHINESE JOURNAL OF PHYSICS, 1992, 30 (03) : 339 - 349
  • [43] Surface-error Measurement for a Convex Aspheric Mirror Using a Double-stitching Method
    Kim, Goeun
    Lee, Yun-Woo
    Yang, Ho-Soon
    KOREAN JOURNAL OF OPTICS AND PHOTONICS, 2021, 32 (06) : 314 - 322
  • [44] Automatic testing equipment and experiments based on the quantitative shadow method for measuring sub-nanometer deformations on aspheric surface
    Xin, Ke
    Zu, Wei
    Feng, Zhijing
    ADVANCES IN MACHINING AND MANUFACTURING TECHNOLOGY IX, 2008, 375-376 : 608 - 613
  • [45] Calibration method for projection distortion in interferometric testing high order and off-axis aspheric surface with big aperture
    Li, Rui-Gang
    Zheng, Li-Gong
    Xue, Dong-Lin
    Zhang, Xue-Jun
    Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2006, 14 (04): : 533 - 538
  • [46] Theoretical research of aspheric testing by using the digital moire patterns base on the sub-region splicing method
    Man, Yu Chun
    Zhang, Xue Jun
    ADVANCED MANUFACTURING TECHNOLOGY, PTS 1-3, 2011, 314-316 : 1295 - 1299
  • [47] Topography Mapping of Convex Aspheric Surface up to 300 mm Diameter Using "Orthogonal Ray" Method
    Gavlina, Alexandra E.
    Batshev, Vladislav I.
    Novikov, Denis A.
    Sergeeva, Maria V.
    25TH INTERNATIONAL SYMPOSIUM ON ATMOSPHERIC AND OCEAN OPTICS: ATMOSPHERIC PHYSICS, 2019, 11208
  • [48] A Novel Method for Compensating Temperature Measurement Error Caused by Dust Using Infrared Thermal Imager
    Pan, Dong
    Jiang, Zhaohui
    Chen, Zhipeng
    Gui, Weihua
    Xie, Yongfang
    Yang, Chunhua
    IEEE SENSORS JOURNAL, 2019, 19 (05) : 1730 - 1739
  • [49] Surface softness characterization of a novel biomimetic silicone hydrogel contact lens using an atomic force microscopy indentation method
    Sharma, Vinay
    Shi, Charlie Xinfeng
    Wu, James
    INVESTIGATIVE OPHTHALMOLOGY & VISUAL SCIENCE, 2022, 63 (07)
  • [50] Novel noncontact method of surface acoustic waves registration for nondestructive testing
    Karabutov, AA
    Kubyshkin, AP
    Savateyeva, YV
    5TH INTERNATIONAL CONFERENCE ON INDUSTRIAL LASERS AND LASER APPLICATIONS '95, 1996, 2713 : 404 - 413