A novel aspheric surface testing method using part-compensating lens

被引：12
|
作者：
Liu, HL [1 ]
Hao, Q [1 ]
Zhu, QD [1 ]
Sha, DG [1 ]
Zhang, CX [1 ]
机构：
[1] Beihang Univ, Dept Photoelect Engn, Beijing 100083, Peoples R China
来源：
Optical Design and Testing II, Pts 1 and 2 | 2005年 / 5638卷
关键词：
aspheric surface testing; part-compensating lens; interferometry; calibrating lens;
D O I：
10.1117/12.578624
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In contrast to null compensator method in aspheric surface testing, a novel method is presented that uses part-compensating lens and digital moire phase-shift interferometry. Researches are made on measurement principle, design method of part-compensating lens and calibrating lens, and calibrating method. Experiment is made by using spherical surface to simulate aspheric surface testing. The measurement precision is that the P-V value of the testing error can be lambda/10. Using the method presented in this paper, the structure of compensator is much simpler than that of C, null compensator. And one part-compensating lens can be used to test different aspheric surfaces in certain range.
引用
收藏
页码：324 / 329
页数：6
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