Liquid Operation of Silicon Microcantilever Heaters

被引：8
|
作者：
Lee, Jungchul [1 ]
King, William P. [1 ]
机构：
[1] Univ Illinois, Dept Mech Sci & Engn, Urbana, IL 61801 USA
来源：
IEEE SENSORS JOURNAL | 2008年 / 8卷 / 11-12期
关键词：
Laser Raman thermometry; liquid operation; microcantilever; microcantilever heater; resistive thermometer;
D O I：
10.1109/JSEN.2008.2005159
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This letter reports characterization and calibration of silicon microcantilever heaters for operation in liquid environments. Cantilever thermomechanical noise spectra were measured in air and in water using a commercial atomic force microscope. Cantilever electrical characteristics were measured in air and water. Laser Raman thermometry measured cantilever temperature in air and water, allowing temperature calibration through comparison with electrical characteristics. Cantilever thermal conductance in water was 136-610 W/K, depending upon the cantilever type. The cantilever electrical resistance is an accurate measure of cantilever temperature in both air and water.
引用
收藏
页码：1805 / 1806
页数：2
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