Liquid Operation of Silicon Microcantilever Heaters

被引：8
|
作者：
Lee, Jungchul [1 ]
King, William P. [1 ]
机构：
[1] Univ Illinois, Dept Mech Sci & Engn, Urbana, IL 61801 USA
来源：
IEEE SENSORS JOURNAL | 2008年 / 8卷 / 11-12期
关键词：
Laser Raman thermometry; liquid operation; microcantilever; microcantilever heater; resistive thermometer;
D O I：
10.1109/JSEN.2008.2005159
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This letter reports characterization and calibration of silicon microcantilever heaters for operation in liquid environments. Cantilever thermomechanical noise spectra were measured in air and in water using a commercial atomic force microscope. Cantilever electrical characteristics were measured in air and water. Laser Raman thermometry measured cantilever temperature in air and water, allowing temperature calibration through comparison with electrical characteristics. Cantilever thermal conductance in water was 136-610 W/K, depending upon the cantilever type. The cantilever electrical resistance is an accurate measure of cantilever temperature in both air and water.
引用
收藏
页码：1805 / 1806
页数：2
相关论文
共 50 条
  • [21] CVD silicon carbide electric heaters
    L. M. Ivanova
    K. D. Demakov
    M. N. Shakhov
    Yu. N. Prokhorov
    Inorganic Materials, 2012, 48 : 588 - 592
  • [22] Adsorption of trinitrotoluene on uncoated silicon microcantilever surfaces
    Pinnaduwage, LA
    Yi, D
    Tian, F
    Thundat, T
    Lareau, RT
    LANGMUIR, 2004, 20 (07) : 2690 - 2694
  • [23] An Improved Photoinduced Model for Silicon Based Microcantilever
    Saxena, P. K.
    JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, 2010, 5 (03) : 355 - 359
  • [24] A silicon beam-based microcantilever nanoelectrosprayer
    Arscott, Steve
    Legrand, Bernard
    Buchaillot, Lionel
    Ashcroft, Alison E.
    SENSORS AND ACTUATORS B-CHEMICAL, 2007, 125 (01): : 72 - 78
  • [25] Efficient and safe operation of indirect fired heaters
    Marlett, FD
    JOURNAL OF CANADIAN PETROLEUM TECHNOLOGY, 1997, 36 (10): : 41 - 47
  • [26] PREPARATION AND OPERATION OF AIR HEATERS WITH SILICA STONES
    ESFELD, G
    HOLLOH, W
    STAHL UND EISEN, 1972, 92 (04): : 161 - &
  • [27] Composition resistors for prolonged operation in space heaters
    Gorelov, V.P., 1600, (03):
  • [28] Analyzing the operation of efficient solar air heaters
    Abbasov, E.S.
    Umurzakova, M.A.
    Applied Solar Energy (English translation of Geliotekhnika), 2002, 38 (03): : 29 - 31
  • [29] Dual channel microcantilever heaters for selective detection and quantification of a generic mixture of volatile organic compounds
    Jahangir, Ifat
    Koley, Goutam
    2016 IEEE SENSORS, 2016,
  • [30] Microcantilever Sensors for Chemical and Biological Applications in Liquid
    Zhang Hui-Yong
    Pan Hong-Qing
    Zhang Bai-Lin
    Tang Ji-Lin
    CHINESE JOURNAL OF ANALYTICAL CHEMISTRY, 2012, 40 (05) : 801 - 807
12345