Fracture testing of silicon microcantilever beams

被引：0
|
作者：
机构：
来源：
J Appl Phys | / 5卷 / 2386期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Fracture testing of silicon microcantilever beams
    Wilson, CJ
    Ormeggi, A
    Narbutovskih, M
    JOURNAL OF APPLIED PHYSICS, 1996, 79 (05) : 2386 - 2393
  • [2] Fracture testing of bulk silicon microcantilever beams subjected to a side load
    Wilson, CJ
    Beck, PA
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1996, 5 (03) : 142 - 150
  • [3] Various fatigue testing of polycrystalline silicon microcantilever beam in bending
    Hong Hocheng
    Hung, Jeng-Nan
    Guu, Yunn-Horng
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2008, 47 (06) : 5256 - 5261
  • [4] Impact testing of silicon micromachined beams
    Lee, CH
    Kaajakari, V
    Lal, A
    MATERIALS AND DEVICE CHARACTERIZATION IN MICROMACHINING II, 1999, 3875 : 80 - 86
  • [5] Efficient parametric excitation of silicon-on-insulator microcantilever beams by fringing electrostatic fields
    Linzon, Yoav
    Ilic, Bojan
    Lulinsky, Stella
    Krylov, Slava
    JOURNAL OF APPLIED PHYSICS, 2013, 113 (16)
  • [6] Facile modification of freestanding silicon nitride microcantilever beams by dry film photoresist lithography
    Nilsen, Madeleine
    Port, Fabian
    Roos, Michael
    Gottschalk, Kay-Eberhard
    Strehle, Steffen
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2019, 29 (02)
  • [7] Measuring fracture toughness of human dental enamel at small scale using notched microcantilever beams
    Chu, Kangjie
    Zhao, Cancan
    Ren, Fuzeng
    BIOSURFACE AND BIOTRIBOLOGY, 2021, 7 (04) : 228 - 232
  • [8] Mass Sensitivity of Nonuniform Microcantilever Beams
    Singh, Sajal Sagar
    Pal, Prem
    Pandey, Ashok Kumar
    JOURNAL OF VIBRATION AND ACOUSTICS-TRANSACTIONS OF THE ASME, 2016, 138 (06):
  • [9] FRACTURE TESTING WOOD ADHESIVES WITH COMPOSITE CANTILEVER BEAMS
    SCOTT, CT
    RIVER, BH
    KOUTSKY, JA
    JOURNAL OF TESTING AND EVALUATION, 1992, 20 (04) : 259 - 264
  • [10] Controlling and testing the fracture strength of silicon on the mesoscale
    Chen, KS
    Ayon, A
    Spearing, SM
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2000, 83 (06) : 1476 - 1484
12345