Fracture testing of silicon microcantilever beams

被引:0
|
作者
机构
来源
J Appl Phys | / 5卷 / 2386期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [21] Microscale Fracture Behavior of Single Crystal Silicon Beams at Elevated Temperatures
    Jaya, Balila Nagamani
    Wheeler, Jeffrey M.
    Wehrs, Juri
    Best, James P.
    Soler, Rafael
    Michler, Johann
    Kirchlechner, Christoph
    Dehm, Gerhard
    NANO LETTERS, 2016, 16 (12) : 7597 - 7603
  • [22] Thermomechanical deflection of microcantilever beams in scanning force microscopes
    Li, BQ
    Lin, J
    Wang, W
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1996, 6 (03) : 330 - 336
  • [23] Mechanical deflection of polysilicon microcantilever beams using nanoindentation
    Ding, Jianning
    Meng, Yonggang
    Wen, Shizhu
    Chinese Journal of Mechanical Engineering (English Edition), 2000, 13 (04): : 251 - 257
  • [24] Full Operational Range Dynamic Modeling of Microcantilever Beams
    Abtahi, Mansour
    Vossoughi, Gholamreza
    Meghdari, Ali
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2013, 22 (05) : 1190 - 1198
  • [25] THE EFFECT OF CARBON NANOTUBES ON THE NATURAL FREQUENCIES OF MICROCANTILEVER BEAMS
    Rokni, Hossein D. T.
    Milani, Abbas S.
    Seethaler, Rudolf J.
    Holzman, Jonathan
    PROCEEDINGS OF THE ASME INTERNATIONAL DESIGN ENGINEERING TECHNICAL CONFERENCES AND COMPUTERS AND INFORMATION IN ENGINEERING CONFERENCE 2010, VOL 1, PTS A AND B, 2010, : 29 - 34
  • [26] Design and analysis of microcantilever beams based on arrow shape
    Ashok, Akarapu
    Nighot, Rohit Prakash
    Sahu, Nagesh Kumar
    Pal, Prem
    Pandey, Ashok Kumar
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2019, 25 (11): : 4379 - 4390
  • [27] Fabrication of microcantilever with a silicon tip prepared by anodization
    Higa, K
    Asano, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (12B): : 7078 - 7080
  • [28] A fracture mechanics approach to material testing and structural analysis of FRC beams
    Jansson, A.
    Gylltoft, K.
    Lofgren, I.
    FRACTURE MECHANICS OF CONCRETE AND CONCRETE STRUCTURES, VOLS 1-3: VOL 1: NEW TRENDS IN FRACTURE MECHANICS OF CONCRETE; VOL 2: DESIGN, ASSESSMENT AND RETROFITTING OF RC STRUCTURES; VOL 3: HIGH-PERFORMANCE CONCRETE, BRICK-MASONRY AND ENVIRONMENTAL ASPECTS, 2007, 1-3 : 1491 - +
  • [29] Silicon microcantilever hotplates with high temperature uniformity
    Privorotskaya, Natalya L.
    King, William P.
    SENSORS AND ACTUATORS A-PHYSICAL, 2009, 152 (02) : 160 - 167
  • [30] An Improved Photoinduced Model for Silicon Based Microcantilever
    Saxena, P. K.
    JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, 2010, 5 (03) : 355 - 359