Microstructure and magnetic properties of oxidized titanium nitride thin films in situ grown by pulsed laser deposition

被引：33

作者：

Chen, S. C. ^{[1
]}

Sung, K. Y. ^{[1
]}

Tzeng, W. Y. ^{[1
]}

Wu, K. H. ^{[1
]}

Juang, J. Y. ^{[1
]}

Uen, T. M. ^{[1
]}

Luo, C. W. ^{[1
]}

Lin, J-Y ^{[2
]}

Kobayashi, T. ^{[1
]}

Kuo, H. C. ^{[3
,4
]}

机构：

[1] Natl Chiao Tung Univ, Dept Electrophys, Hsinchu 30050, Taiwan

[2] Natl Chiao Tung Univ, Inst Phys, Hsinchu, Taiwan

[3] Natl Chiao Tung Univ, Dept Photon, Hsinchu, Taiwan

[4] Natl Chiao Tung Univ, Inst Electroopt Engn, Hsinchu, Taiwan

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2013年 / 46卷 / 07期

关键词：

X-RAY-ABSORPTION; ELECTRON-ENERGY-LOSS; TIO2; FILMS; TRANSPORT-PROPERTIES; OXIDATION; ANATASE; TIN; FERROMAGNETISM;

D O I：

10.1088/0022-3727/46/7/075002

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Different oxidation states of titanium nitride thin films, including pure TiN(h 0 0), TiN1-xOx(h 0 0), Ti2O3(0 0 l) and pure anatase TiO2(0 0 l), were prepared by pulsed laser deposition with various oxygen pressures (P-O2) using a TiN target. Elaborative evolutions of the crystal and electronic structures of the obtained films were examined systematically by x-ray diffraction and x-ray absorption spectroscopy. We found that the Ti2O3(0 0 l) film, which was prepared at oxygen pressures P-O2 = 10(-4) Torr, exhibited the maximum room temperature ferromagnetism (RTFM) behaviour. The bound magnetic polaron model is used to clarify the origin of RTFM in these films.

引用

页数：7

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