Design and modeling of MEMS capacitive gyroscope

被引：0
|
作者：
Singh, Prashant [1 ]
Gupta, Prachi [1 ]
Srivastava, Pooja [1 ]
Chaudhary, Rajshri Kumari [1 ]
机构：
[1] Indian Inst Informat Technol, Dept Microelect, Allahabad, Uttar Pradesh, India
来源：
2013 INTERNATIONAL CONFERENCE ON ENERGY EFFICIENT TECHNOLOGIES FOR SUSTAINABILITY (ICEETS) | 2013年
关键词：
Comb structure; coriolis force; Inertial sensor; driving resonance frequency;
D O I：
暂无
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
The present papers deals with the designing of MEMS gyroscope for high driving resonance frequency and to study the effects of various structural parameters on the device performance. The design is based on comb capacitor configuration, which is excited by electrostatic force, sensing is based on transverse axis movement and is designed with 2 mu m thick polycrystalline silicon layer. The device is modeled for single DOF in accordance with standard SOI-MUMP's technology using MEMS Pro v5.1 simulation tool.
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页数：5
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