Design of Capacitive MEMS Ring Solid-state Vibrating Gyroscope Interface Circuit

Interface circuit of the capacitive MEMS gyro is the electromechanical energy conversion component of the gyro. The excitation electrostatic force of the drive mode is generated by a voltage input to the drive electrode of the gyro-sensitive structure. The Coriolis inertial force response of the detection mode is output in the form of capacitor change of the detection electrode. The high sensitivity interface circuit design is the basis of the stable operation and high accuracy measurement of the gyro. This paper designs the electrical model of capacitive electrode and its interface circuit for the ring sensitive structure for capacitive MEMS ring solid-state vibrating gyroscope, analyzes the electrical parameters of the interface circuit and studies the electrostatic driving technology of the interface circuit, verifies the driving method of capacitive MEMS gyro, and provides the necessary theoretical basis for its further processing and performance testing.