A MEMS Capacitive Gyroscope with Improved Reliability

被引：0
|
作者：
Liang, X. J. [1 ]
Gao, S. Q. [1 ]
机构：
[1] Beijing Inst Technol, Mech & Elect Coll, Beijing 100081, Peoples R China
来源：
ADVANCES IN MATERIALS MANUFACTURING SCIENCE AND TECHNOLOGY XIII, VOL II: MODERN DESIGN THEORY AND METHODOLOGY, MEMS AND NANOTECHNOLOGY, AND MATERIAL SCIENCE AND TECHNOLOGY IN MANUFACTURING | 2009年 / 628-629卷
关键词：
MEMS gyroscope; reliability; adhesion failure; lateral comb capacitor;
D O I：
10.4028/www.scientific.net/MSF.628-629.341
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The MEMS capacitive gyroscope has wide application foreground, the reliability of MEMS gyroscope is a key problem for its commercial application. With the development of the MEMS gyroscope industrialization, the reliability is underway to meet the need of market. In this paper, the adhesion failure modes of the MEMS gyroscope were presented. In addition, the adhesion failure analysis was illustrated. Finally, a lateral comb structure to improve the reliability of the MEMS gyroscope was presented. Test result indicates that the reliability of the MEMS capacitive gyroscope is improved.
引用
收藏
页码：341 / 346
页数：6
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