Adhesion measurement of thin films on glass substrates by scratch method

Adhesion of thin films on glass substrates was evaluated by a round robin experiment using a scratch method. When diamond stylus of 15 mu m tip radius was used in the scanning type scratch machine, the critical load to peel off the film ranged in the range of 10-500 mN which corresponded to thr adhesion strength in the range of 0.6-2.7 GPa. The scatter of the measured data was large except for some tightly adhered ceramics films, and some of them are considered as candidates for standard materials of adhesion measurements. Part of the data's scattering is due to the inhomogeneity of the adhesion state, but the importance of the sample and the stylus preservation is also suggested.