共 50 条
- [41] Interferometric metrology of wafer nanotopography for advanced CMOS process integration [J]. OPTICAL METROLOGY ROADMAP FOR THE SEMICONDUCTOR, OPTICAL, AND DATA STORAGE INDUSTRIES II, 2001, 4449 : 160 - 168
- [43] An overview of interferometric metrology and NDT techniques and applications for the aerospace industry [J]. INTERFEROMETRY XVIII, 2016, 9960
- [44] HOLOGRAFIC-INTERFEROMETRIC METROLOGY .3. VIBRATION MEASUREMENT [J]. TECHNISCHES MESSEN, 1980, 47 (04): : 147 - 153
- [45] Mastering the effects of air turbulence in optical components interferometric metrology [J]. OPTIFAB 2021, 2021, 11889
- [46] Influence of spacial temperature distribution on high accuracy interferometric metrology [J]. 5TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTICAL TEST AND MEASUREMENT TECHNOLOGY AND EQUIPMENT, 2010, 7656
- [47] Adaptive interferometric null testing for unknown freeform optics metrology [J]. OPTICS LETTERS, 2016, 41 (23) : 5539 - 5542
- [49] Metrology, attitude, and orbit determination for spaceborne interferometric synthetic aperture radar [J]. ACQUISITION, TRACKING, AND POINTING XII, 1998, 3365 : 51 - 60