Interferometric sphere surface metrology with cylindrical reference for precision topography

被引:0
|
作者
Schultze, Alexander [1 ]
Sell, Alexander [1 ]
Weise, Dennis [1 ]
Koegel, Harald [1 ]
Braxmaier, Claus [2 ,3 ]
机构
[1] Airbus DS GmbH, D-88090 Immenstaad, Germany
[2] DLR, Inst Quantum Technol, D-89077 Ulm, Germany
[3] Univ Ulm, Inst Mikroelekt, D-89069 Ulm, Germany
关键词
MASS;
D O I
10.1364/AO.450463
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We demonstrate a method for measuring a surface map of a spherical body with interferometric optical point sensors while rotating the test subject. The setup takes advantage of the excellent performance of heterodyne interferometry at nanometer levels and suppression of common-mode errors, as a cylindrical mirror mounted adjacent to the sphere is used as a reference. Future space based missions for gravitational wave research demand an improved inertial reference sensor with reduced acceleration noise levels. Spherical test masses can enable increased performance by suspension-free operation, contrary to cuboid solutions suffering from cross-coupling of attitude control noise into test mass position. However, interferometric readout is affected by surface irregularities and test mass attitude. An accurate surface map for compensation of the center of gravity readout should be established, by characterization either a priori or in-flight, when optical path length changes due to the surface occur in the measurement bandwidth. (C) 2022 Optica Publishing Group
引用
收藏
页码:4098 / 4105
页数:8
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