Design and Dynamic Response Analysis of A Flexure-Based Nano-positioning System

被引：0
|
作者：
Wu, Dingbing [1 ,2 ]
Zhang, Chi [1 ]
Yang, Aolei [2 ]
Yang, Guilin [1 ]
Dong, Liang [1 ,2 ]
Liu, Qiang [1 ]
机构：
[1] Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Beijing 100864, Peoples R China
[2] Shanghai Univ, Sch Mechatron Engn & Automat, Shanghai 200041, Peoples R China
来源：
PROCEEDINGS OF THE 2016 IEEE 11TH CONFERENCE ON INDUSTRIAL ELECTRONICS AND APPLICATIONS (ICIEA) | 2016年
关键词：
nano-positioning; complex parallel four-bar mechanism; finite element analysis; modal analysis;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper proposes a nano-positioning system driven by a high force density voice coil motor (VCM) and supported by a complex parallel four-bar flexure mechanism. The VCM employs bilateral Halbach permanent magnet (PM) arrays and triple-segment coils to achieve high force-current ratio and low force ripple. Complex parallel four-bar flexure mechanism is designed to obtain high stiffness and good dynamic performance. The stiffness model of the positioning system is derived with analytical method. The finite element analysis (FEA) shows that the stiffness is approximately linear within the elastic deformation. On the other hand, the vibration modal of the nano-positioning system is analyzed with hammering test with LMS test. lab, FEA and sine-sweep frequency test respectively. The analysis and experimental results prove the dynamic responses and vibration modes derived from these three methods are nearly identical, and the first-order resonance frequency is highly increased.
引用
收藏
页码：2456 / 2461
页数：6
相关论文
共 50 条
  • [41] Design and computational optimization of a flexure-based XY positioning platform using FEA-based response surface methodology
    Huang, Shyh-Chour
    Thanh-Phong Dao
    INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2016, 17 (08) : 1035 - 1048
  • [42] Design, analysis, and test of a decoupled flexure-based 5-DOF micro-positioning platform
    Jian Zhang
    Yujia Zhang
    Minglun Dong
    Journal of Mechanical Science and Technology, 2022, 36 : 3883 - 3896
  • [43] A magnetic-actuator based planar nano-positioning system
    Krishna, R.
    Jayanth, G. R.
    7TH INTERNATIONAL CONFERENCE ON MANIPULATION, AUTOMATION, AND ROBOTICS AT SMALL SCALES, MARSS 2024, 2024, : 54 - +
  • [44] H∞ loop shaping design for nano-positioning
    Sebastian, A
    Salapaka, S
    PROCEEDINGS OF THE 2003 AMERICAN CONTROL CONFERENCE, VOLS 1-6, 2003, : 3708 - 3713
  • [45] Dynamic Analysis of A Flexure-based Mechanism for Precision Machining Operation
    Tian, Yanling
    Zhang, Dawei
    Shirinzadeh, Bijan
    11TH INTERNATIONAL CONFERENCE ON CONTROL, AUTOMATION, ROBOTICS AND VISION (ICARCV 2010), 2010, : 811 - 815
  • [46] The Design of Kalman Filter for Nano-Positioning Stage
    Dai, Jing
    Qu, Peng
    Shao, Meng
    Zhang, Hui
    Mao, Yongming
    HARMONY SEARCH ALGORITHM, 2016, 382 : 69 - 75
  • [47] Design, analysis, and test of a decoupled flexure-based 5-DOF micro-positioning platform
    Zhang, Jian
    Zhang, Yujia
    Dong, Minglun
    JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, 2022, 36 (08) : 3883 - 3896
  • [48] Model Predictive Control Design of a Flexure-Based Micropositioning System
    Wang, Piyu
    Xu, Qingsong
    PROCEEDINGS OF THE 28TH CHINESE CONTROL AND DECISION CONFERENCE (2016 CCDC), 2016, : 5232 - 5236
  • [49] Design of a Flexure-based XY Positioning Stage with Balanced Axial Forces on Decoupling Modules
    Zhang, Zhen
    Liu, Zhiqing
    Yan, Peng
    2016 6TH IEEE INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (IEEE 3M-NANO), 2016, : 83 - 88
  • [50] An optimized design of a large stroke beam flexure-based parallel nano manipulator
    Wang, Peng
    Zhang, Zhen
    Yan, Peng
    2015 54TH IEEE CONFERENCE ON DECISION AND CONTROL (CDC), 2015, : 7341 - 7346
12345