Design and Dynamic Response Analysis of A Flexure-Based Nano-positioning System

This paper proposes a nano-positioning system driven by a high force density voice coil motor (VCM) and supported by a complex parallel four-bar flexure mechanism. The VCM employs bilateral Halbach permanent magnet (PM) arrays and triple-segment coils to achieve high force-current ratio and low force ripple. Complex parallel four-bar flexure mechanism is designed to obtain high stiffness and good dynamic performance. The stiffness model of the positioning system is derived with analytical method. The finite element analysis (FEA) shows that the stiffness is approximately linear within the elastic deformation. On the other hand, the vibration modal of the nano-positioning system is analyzed with hammering test with LMS test. lab, FEA and sine-sweep frequency test respectively. The analysis and experimental results prove the dynamic responses and vibration modes derived from these three methods are nearly identical, and the first-order resonance frequency is highly increased.