共 50 条
- [41] SUB-MICRON OPTICAL LITHOGRAPHY USING INORGANIC RESISTS PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1983, 393 : 41 - 48
- [43] MICRON AND SUB-MICRON LITHOGRAPHY FOR VLSI DEVICE FABRICATION SCANNING ELECTRON MICROSCOPY, 1981, : 343 - 350
- [44] Scaling SOI photonics to micron and sub-micron devices Opto-Ireland 2005: Nanotechnology and Nanophotonics, 2005, 5824 : 13 - 22
- [46] Dielectrophoretic dual-frequency electrode array for the manipulation of sub-micron sized particles CONFERENCE RECORD OF THE 2002 IEEE INDUSTRY APPLICATIONS CONFERENCE, VOLS 1-4, 2002, : 2454 - 2459
- [47] Jitter in deep sub-micron interconnect IEEE COMPUTER SOCIETY ANNUAL SYMPOSIUM ON VLSI, PROCEEDINGS: NEW FRONTIERS IN VLSI DESIGN, 2005, : 84 - 89
- [48] Sub-micron sculpturing on chalcogenide films Micromachining Technology for Micro-Optics and Nano-Optics III, 2005, 5720 : 56 - 67
- [50] SUB-MICRON GRATING FABRICATION ON GAAS PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1981, 269 : 49 - 54