Resonance frequency detection system of Piezoelectric Micro-cantilever

被引：0
|
作者：
Hu Chang-de [1 ]
Zhao Mei-rong [2 ]
Deng Xiao-bei [3 ]
Zhu Sha [1 ]
机构：
[1] Acad Equipment Command & Technol, Dept Noncommissioned Officer, Beijing, Peoples R China
[2] Tianjin Univ, State Key Lab Precis Measuring Technol & Measurem, Tianjin, Peoples R China
[3] Off Peoples Republ China Patent Examinat Coop Ctr, State Intellectual Property, Commun Invent Examinat Div, Beijing, Peoples R China
来源：
MANUFACTURING SCIENCE AND MATERIALS ENGINEERING, PTS 1 AND 2 | 2012年 / 443-444卷
关键词：
piezoelectric micro-cantilever; resonance frequency; amplitude; piezoelectric film;
D O I：
10.4028/www.scientific.net/AMR.443-444.115
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A kind of resonance frequency detection of piezoelectric micro-cantilever is presented, where there is piezoelectric film deposited. The alternating current is put on the film to make it vibrate, and when resonance frequency happens, the amplitude of piezoelectric micro-cantilever reaches the maximal. A series of experiments have been done by the driving power and detecting power designed by ourselves. The experiments show that resonance frequency can be detected by the amplifier, and the amplitude of the resonance frequency is obviously bigger than the amplitude of the other frequency. The maximal amplitude is about 600nm.
引用
收藏
页码：115 / +
页数：2
相关论文
共 50 条
  • [41] Period doubling of the nonlinear dynamical system of an electrostatically actuated micro-cantilever
    Chen, Y. M.
    Liu, J. K.
    SMART STRUCTURES AND SYSTEMS, 2014, 14 (05) : 743 - 763
  • [42] On approximate treatment of nonlinear dynamical system of an electrostatically actuated micro-cantilever
    Chen, Y. M.
    Meng, G.
    Liu, J. K.
    APPLIED MECHANICS AND MECHANICAL ENGINEERING, PTS 1-3, 2010, 29-32 : 2211 - +
  • [43] Iterative solution of nonlinear dynamical system of an electrostatically actuated micro-cantilever
    Lan, Qiang
    Zhang, Jie
    Liu, Qixin
    Chen, Yanmao
    SENSORS, MEASUREMENT AND INTELLIGENT MATERIALS II, PTS 1 AND 2, 2014, 475-476 : 1643 - +
  • [44] A piezoelectric micro-cantilever acoustic vector sensor designed considering fluid-structure interaction
    Kim, Junsoo
    Yang, Seongkwan
    Oh, Keunha
    Moon, Wonkyu
    JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 2021, 150 (01): : 257 - 269
  • [45] Quality Factor Enhancement of an Atomic Force Microscope Micro-cantilever Using Piezoelectric Shunt Control
    Fairbairn, Matthew W.
    Moheimani, S. O. Reza
    2012 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM), 2012, : 556 - 561
  • [46] Dynamic analysis of micro-cantilever with electrostatic force
    Kaneria, Anchit J.
    Patel, Pinank
    Sharma, D. S.
    Trivedi, Reena
    AUSTRALIAN JOURNAL OF MECHANICAL ENGINEERING, 2022, 20 (03) : 875 - 882
  • [47] Micro-cantilever flow sensor for small aircraft
    Ghommem, Mehdi
    Calo, Victor M.
    Claudel, Christian G.
    JOURNAL OF VIBRATION AND CONTROL, 2015, 21 (10) : 2043 - 2058
  • [48] Study of infrared thermal detector of micro-cantilever
    Liang, JT
    Liu, JH
    Zheng, ZZ
    ISTM/2005: 6TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-9, CONFERENCE PROCEEDINGS, 2005, : 2151 - 2153
  • [49] Vacuum packaged micro-cantilever with a magnetic particle
    Mohd N.
    Xue G.
    Inomata N.
    Van Toan N.
    Toda M.
    Ono T.
    IEEJ Transactions on Sensors and Micromachines, 2017, 137 (08) : 245 - 246
  • [50] A resonant gas sensor based on micro-cantilever
    Li, Shuangmei
    TRENDS IN BUILDING MATERIALS RESEARCH, PTS 1 AND 2, 2012, 450-451 : 1532 - 1535
12345