RELIABLE CARBON NANOTUBE BASED MICRO WIRE FOR MICRO FOCUS FIELD EMISSION X-RAY SOURCE BY MICROMACHINING

被引：0

作者：

Sun, Bin ^{[1
]}

Wang, Yan ^{[1
]}

Deng, Min ^{[1
]}

Ding, Guifu ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Natl Key Lab Micronano Fabricat Technol, Sch Elect Informat & Elect Engn, Shanghai 200240, Peoples R China

来源：

2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2017年

基金：

中国国家自然科学基金; 高等学校博士学科点专项科研基金;

关键词：

carbon nanotube; x-ray source; field emission; micromachining; EMITTERS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports the design and characterization of a CNT based field emission x-ray source that affords a high spatial resolution. This work builds on a method reported at IEEE MEMS 2016, which was mainly focused on the fabrication process and material characterization. This paper will unveil more experimental results using for micro focus field emission x-ray source. A simplified imaging system was built to measure the x-ray focal spot size based on the pinhole imaging. Thanks to the effective direct contact and the strong interactions between CNTs and the substrate, field emission current of 1.11 mA could be achieved from the micro wire. Moreover, a stable effective elliptical focal spot size (30x120 um(2)) can be obtained from experimental measurements using such design. Due to the small focal spot size obtained from the micro wire, clear radiographic images of 30 um bars were achieved.

引用

页码：1967 / 1970

页数：4

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