Frequency Sources and Filters Applications Using High Overtone Bulk Acoustic Resonators Exhibiting High Q.f Product

被引：1
|
作者：
Gachon, Dorian [1 ]
Masson, Jeremy [1 ]
Courjon, Emilie [1 ]
Gruson, Yannick [1 ]
Ballandras, Sylvain [1 ]
机构：
[1] FEMTO ST Inst, Dept Time & Frequency, Besancon, France
来源：
2008 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, VOLS 1 AND 2 | 2008年
关键词：
D O I：
10.1109/FREQ.2008.4623106
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Bulk acoustic waves excited in thin piezoelectric films have revealed their capabilities for addressing the problem of high frequency RF filters and frequency sources (above 1 GHz). In this paper, we propose an alternative to thin film deposition consisting in single crystal wafers bonded on substrate (high quality) and thinned down, allowing for plate thickness close to 30 mu m. This has been achieved on 3 inches wafers and allows for an accurate selection of the wave characteristics.
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页码：783 / 788
页数：6
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