BVD and Mason's modelling of piezoelectric bulk acoustic resonators for high frequency applications

被引:2
|
作者
Chaudhary, Samya [1 ]
Singh, Jitendra [2 ]
Haque, Fozia Z. [1 ]
机构
[1] Maulana Azad Natl Inst Technol, Dept Phys, Opt Nanomat Lab, Bhopal 462003, India
[2] CSIR Cent Elect Engn Res Inst, Pilani 333031, India
关键词
Microelectromechanical systems; SAW; BAW resonators; MATLAB Simulink;
D O I
10.1016/j.matpr.2022.04.769
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper deals with the electrical features of BAW devices designed specifically for 3.83 GHz applica-tions which are highly in demand as per the keyless controls or wireless telecommunication technologies such as mobile phone applications. Results of the BVD analytical modelling are shown in form of 1D BVD circuit parametric analysis for one vibration mode of piezoelectric plate of AlN of 250 nm. The relation between the two resonant frequencies with the physical parameters of a resonator is important for designing circuits and for analysis of electrical behaviour of piezoelectric materials. Resonators are used where narrow filtering characteristics are required such as entry remote controls, cellphone filters or GPS receivers. Surface acoustic wave resonators are not very suitable for most demanding applications. Compared to it and dielectric ceramic filters, the BAW technology provides advantages in insertion loss, Q values, operating frequency, power handling capacity, temperature stability with also having added benefits of small size & low cost. We used MATLAB Simulink, 1D modelling to get an impedance fre-quency response of 3.83 GHz BAW resonator. Calculations were performed to get the desired resonant frequency & in accordance with the major parameters of interest, we got the required magnitude plot in Bode frequency response diagram corresponding to motional leg of a modified BVD Circuit. It was found that the maximum value of Impedance was 149 dB at Anti resonant frequency of 3.909 GHz and minimum value of Impedance as-75.4 dB at resonant frequency of 3.83 GHz with higher gain & phase margins. After that we performed similar analysis for Mason's model implementation of the Impedance equation using MATLAB software.Copyright (c) 2022 Elsevier Ltd. All rights reserved.Selection and peer-review under responsibility of the scientific committee of the XII th Biennial National Conference of Physics Academy of North East (PANE 2021).
引用
收藏
页码:2556 / 2559
页数:4
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