Surface passivation of GaAs nanowires by the atomic layer deposition of AlN

被引:1
|
作者
Shtrom, I. V. [1 ,2 ,3 ]
Bouravleuv, A. D. [1 ,2 ,3 ]
Samsonenko, Yu B. [2 ,3 ,4 ]
Khrebtov, A. I. [2 ,4 ]
Soshnikov, I. P. [1 ,2 ,3 ]
Reznik, R. R. [2 ,4 ,6 ]
Cirlin, G. E. [2 ,3 ,4 ]
Dhaka, V. [5 ]
Perros, A. [5 ]
Lipsanen, H. [5 ]
机构
[1] Russian Acad Sci, Ioffe Phys Tech Inst, St Petersburg 194021, Russia
[2] St Petersburg Natl Res Acad Univ, Russian Acad Sci, Nanotechnol Res & Educ Ctr, St Petersburg 194021, Russia
[3] Russian Acad Sci, Inst Analyt Instrumentat, St Petersburg 190103, Russia
[4] St Petersburg Natl Res Univ Informat Technol Mech, St Petersburg 197101, Russia
[5] Aalto Univ, FI-00076 Espoo, Finland
[6] St Petersburg State Polytech Univ, St Petersburg 195251, Russia
基金
俄罗斯科学基金会;
关键词
PHOTOLUMINESCENCE;
D O I
10.1134/S1063782616120186
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
It is shown that the atomic layer deposition of thin AlN layers can be used to passivate the surface states of GaAs nanowires synthesized by molecular-beam epitaxy. Studies of the optical properties of samples by low-temperature photoluminescence measurements shows that the photoluminescence-signal intensity can be increased by a factor of up to five by passivating the nanowires with a 25--thick AlN layer.
引用
收藏
页码:1619 / 1621
页数:3
相关论文
共 50 条
  • [21] Passivation of In0.53Ga0.47As/ZrO2 interfaces by AlN atomic layer deposition process
    Weiland, C.
    Rumaiz, A. K.
    Price, J.
    Lysaght, P.
    Woick, J. C.
    JOURNAL OF APPLIED PHYSICS, 2013, 114 (03)
  • [22] Initial reaction mechanism of H-passivated Ge surface passivation by atomic layer deposition of Al2O3 and AlN
    Xu, Yan
    Chen, Lin
    Sun, Qing-Qing
    Wang, Peng-Fei
    Ding, Shi-Jin
    Zhang, David Wei
    THIN SOLID FILMS, 2011, 519 (18) : 6000 - 6003
  • [23] Nitride Surface Passivation of GaAs Nanowires: Impact on Surface State Density
    Alekseev, Prokhor A.
    Dunaevskiy, Mikhail S.
    Ulin, Vladimir P.
    Lvova, Tatiana V.
    Filatov, Dmitriy O.
    Nezhdanov, Alexey V.
    Mashin, Aleksander I.
    Berkovits, Vladimir L.
    NANO LETTERS, 2015, 15 (01) : 63 - 68
  • [24] Ultrathin Titanium Dioxide Nanolayers by Atomic Layer Deposition for Surface Passivation of Crystalline Silicon
    Gad, Karim Mohamed
    Voessing, Daniel
    Richter, Armin
    Rayner, Bruce
    Reindl, Leonhard M.
    Mohney, Suzanne E.
    Kasemann, Martin
    IEEE JOURNAL OF PHOTOVOLTAICS, 2016, 6 (03): : 649 - 653
  • [25] Selective Surface Passivation for Ultrathin and Continuous Metallic Films via Atomic Layer Deposition
    Kim, Han
    Kim, Taeseok
    Kim, Minseok
    Jeon, Jihoon
    Park, Gwang Min
    Kim, Sung-Chul
    Won, Sung Ok
    Harada, Ryosuke
    Kim, Sangtae
    Kim, Seong Keun
    NANO LETTERS, 2025, 25 (10) : 4101 - 4107
  • [26] Atomic layer deposition of AlN using trimethylaluminium and ammonia
    Beshkova, M.
    Deminskyi, P.
    Pedersen, H.
    Yakimova, R.
    21ST INTERNATIONAL SUMMER SCHOOL ON VACUUM, ELECTRON AND ION TECHNOLOGIES, 2020, 1492
  • [27] Atomic Layer Epitaxy AlN for Enhanced AlGaN/GaN HEMT Passivation
    Koehler, Andrew D.
    Nepal, Neeraj
    Anderson, Travis J.
    Tadjer, Marko J.
    Hobart, Karl D.
    Eddy, Charles R., Jr.
    Kub, Francis J.
    IEEE ELECTRON DEVICE LETTERS, 2013, 34 (09) : 1115 - 1117
  • [28] GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride
    Bosund, M.
    Mattila, P.
    Aierken, A.
    Hakkarainen, T.
    Koskenvaara, H.
    Sopanen, M.
    Airaksinen, V-M
    Lipsanen, H.
    APPLIED SURFACE SCIENCE, 2010, 256 (24) : 7434 - 7437
  • [29] Effect of atomic-layer-deposited AlN on near-surface InGaAs/GaAs structures
    Mattila, Paivi
    Bosund, Markus
    Jussila, Henri
    Tuomi, Turkka
    Riikonen, Juha
    Huhtio, Teppo
    Lipsanen, Harri
    Sopanen, Markku
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 9, NO 7, 2012, 9 (07): : 1560 - 1562
  • [30] AlN passivation by plasma-enhanced atomic layer deposition for GaN-based power switches and power amplifiers
    Chen, Kevin J.
    Huang, Sen
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2013, 28 (07)