Growth of Carbon Nanotubes on Carbon/Cobalt Films with Different sp2/sp3 Ratios

被引:0
|
作者
Xu, Naiyun [1 ]
Tsang, Siu Hong [2 ]
Tay, Beng Kang [1 ]
Teo, Edwin Hang Tong [1 ]
Ng, Chee Mang [3 ]
机构
[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore
[2] Temasek Lab NTU, Singapore 639798, Singapore
[3] GLOBALFOUNDRIES Singapore Pte Ltd, Singapore 738406, Singapore
关键词
ELECTRICAL-PROPERTIES; INTERCONNECT; EMISSION;
D O I
10.1155/2013/730952
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The need of barrier layer such as SiO2 for carbon nanotubes (CNTs) growth limits their performance in electronic applications. In this study, conductive carbon/metal (carbon/cobalt-C:Co) composite films with the same metal content, but different sp(2)/sp(3) ratios, were deposited using dual-source filtered cathodic vacuum arc (FCVA) technique. Three different C:Co composite films were deposited at different temperatures; visible Raman spectroscopy indicates that the sp(2)-rich C:Co composite film forms at high temperature (500 degrees C), and high-resolution transmission electron microscopy (HRTEM) shows the formation of conducting graphitic-like sp(2) clusters and with Co nanoclusters embedded within them. Electrical measurement shows a significant decrease in film resistivity as sp(2)/sp(3) ratio increases. CNTs were successfully grown on the composite films by plasma-enhanced vapor deposition (PECVD) approach. Scanning electron microscopy (SEM) shows minor effect on the density of CNTs by varying the sp(2)/sp(3) ratio. The dependence of defect level of the as-grown CNTs is found to reduce as sp(2)/sp(3) ratio increases.
引用
收藏
页数:5
相关论文
共 50 条
  • [41] Cobalt-catalyzedreductivealkynylationtoconstructC(sp)-C(sp3)andC(sp)-C(sp2)bonds
    Lei Wan
    Yizhou Tong
    Xi Lu
    Yao Fu
    Chinese Chemical Letters, 2024, 35 (07) : 279 - 284
  • [42] Determining the sp2/sp3 bonding concentrations of carbon films using X-ray absorption spectroscopy
    Hamilton, T.
    Wilks, R. G.
    Yablonskikh, M. V.
    Yang, Q.
    Foursa, M. N.
    Hirose, A.
    Vasilets, V. N.
    Moewes, A.
    CANADIAN JOURNAL OF PHYSICS, 2008, 86 (12) : 1401 - 1407
  • [43] XAES, XPS, EELS and Raman spectroscopy of polycrystalline to amorphous carbon films with various sp3 to sp2 bondings
    Serin, V
    Beche, E
    Berjoan, R
    Abidate, O
    Dorignac, D
    Rats, D
    Fontaine, J
    Vandenbulcke, L
    Germain, C
    Catherinot, A
    PROCEEDINGS OF THE FIFTH INTERNATIONAL SYMPOSIUM ON DIAMOND MATERIALS, 1998, 97 (32): : 126 - 141
  • [44] C sp2/sp3 hybridisations in carbon nanomaterials - XPS and (X)AES study
    Lesiak, B.
    Kover, L.
    Toth, J.
    Zemek, J.
    Jiricek, P.
    Kromka, A.
    Rangam, N.
    APPLIED SURFACE SCIENCE, 2018, 452 : 223 - 231
  • [45] Oxidative coupling of sp2 and sp3 carbon-hydrogen bonds to construct dihydrobenzofurans
    Shi, Jiang-Ling
    Wang, Ding
    Zhang, Xi-Sha
    Li, Xiao-Lei
    Chen, Yu-Qin
    Li, Yu-Xue
    Shi, Zhang-Jie
    NATURE COMMUNICATIONS, 2017, 8
  • [46] Laser-induced direct lithography for patterning of carbon with sp3 and sp2 hybridization
    Zbaida, D
    Popovitz-Biro, R
    Lachish-Zalait, A
    Klein, E
    Wachtel, E
    Prior, Y
    Elbaum, M
    ADVANCED FUNCTIONAL MATERIALS, 2003, 13 (05) : 412 - 417
  • [47] A machine learning approach for the automated classification of bulk sp2 and sp3 carbon materials
    daFonseca, Bruno G.
    Thind, Sapanbir S.
    Booth, Ian
    Brolo, Alexandre G.
    JOURNAL OF RAMAN SPECTROSCOPY, 2024, 55 (01) : 15 - 25
  • [48] EVALUATION OF THE SP2/SP3 RATIO IN AMORPHOUS-CARBON STRUCTURE BY XPS AND XAES
    LASCOVICH, JC
    GIORGI, R
    SCAGLIONE, S
    APPLIED SURFACE SCIENCE, 1991, 47 (01) : 17 - 21
  • [49] sp3/sp2 ratio in amorphous-carbon thin film by spectroscopic ellipsometry
    Li, W.J. (lwjmln@mail.yahoo.com), 1600, American Institute of Physics Inc. (94):
  • [50] Sp3/sp2 character of the carbon and hydrogen configuration in micro- and nanocrystalline diamond
    Ballutaud, D.
    Jomard, F.
    Kociniewski, T.
    Rzepka, E.
    Girard, H.
    Saada, S.
    DIAMOND AND RELATED MATERIALS, 2008, 17 (4-5) : 451 - 456